A compact two-dimensional nano-servo platform
A two-dimensional nanometer and servo platform technology, applied to workbenches, manufacturing tools, etc., can solve problems such as poor structural symmetry, low control precision, and low rigidity, and achieve compact structure, high motion precision, and small volume.
Active Publication Date: 2020-05-19
HANGZHOU DIANZI UNIV
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Problems solved by technology
[0004] Aiming at the technical deficiencies in the prior art, the present invention provides a technical solution of a compact two-dimensional nanometer servo platform driven by piezoelectric ceramics, which avoids the problems of low rigidity, poor structural symmetry, small stroke, and low control precision, and also It has the characteristics of large stroke and high control precision
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[0026] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings.
[0027] A compact two-dimensional nano-servo platform is integrally formed by slow wire cutting, such as Figure 1 to Figure 4 As shown, it includes: base 10; terminal platform 101; X-direction installation part 1071 and Y-direction installation part 1072; X-direction driver 1021 and Y-direction driver 1022; X-direction flexible bridge arm mechanism 1031 and Y-direction flexible bridge arm mechanism 1032 ; X-direction amplification rod 1051 and Y-direction amplification rod 1052; first X-direction driver balance 1041, second X-direction driver balance 1043, first Y-direction driver balance 1042, second Y-direction driver balance 1044; An X-direction rigid connector 1061, a second X-direction rigid connector 1063, a third X-direction rigid connector 1065, a fourth X-direction rigid connector 1067, a first Y-direction rigid connector 1062, and a ...
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The invention discloses a compact two-dimensional nano servo platform and belongs to the technical field of micro and nano manipulation. The compact two-dimensional nano servo platform comprises a base, a terminal platform, an X-direction driver, a Y-direction driver, an X-direction mounting part, a Y-direction mounting part, a third X-direction rigid connector, a third Y-direction rigid connector, a fourth X-direction rigid connector, a fourth Y-direction rigid connector, an X-direction conversion and amplification mechanism, a Y-direction conversion and amplification mechanism, a first X-direction guide part, a first Y-direction guide part, a second X-direction guide part, a second Y-direction guide part, a first X-direction decoupling part, a first Y-direction decoupling part, a secondX-direction decoupling part and a second Y-direction decoupling part. The compact two-dimensional nano servo platform has the advantages that the platform is provided with the conversion and amplification mechanisms, the displacement of the driver can be converted and amplified, large-stroke movement of the terminal platform is achieved, and the platform is compact in structure, small in size, high in movement precision, good in stability and the like.
Description
technical field [0001] The invention belongs to the technical field of micro-nano control, and in particular relates to a compact two-dimensional nano-servo platform. Background technique [0002] At present, the servo motion platform has become a research hotspot in the field of micro-nano manipulation. The servo motion platform is divided into two types: series type and parallel type, and its development direction is large stroke and high precision. There are sliding friction factors in the movement process of the serial motion platform, so the control accuracy is low. The parallel kinematic platform uses the deformation of the flexible mechanism to generate axial displacement, which can achieve high control precision and has great development potential. [0003] The drive mode of the parallel motion platform generally chooses voice coil motor or piezoelectric ceramic (PZT). The voice coil motor has a large stroke, but the driving force is relatively small. PZT has a l...
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IPC IPC(8): B25H1/00B25H1/10
CPCB25H1/00B25H1/10
Inventor 张扬名薛凌云罗彪汪昌明
Owner HANGZHOU DIANZI UNIV