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Double-degree-of-freedom electro-hydraulic controlled micro-displacement system

A technology of electro-hydraulic control and degree of freedom, applied in the direction of electrical components, electric devices, electromagnetic means, etc., can solve the problems that cannot meet the needs of practical applications, insufficient magnification, high system requirements, etc., to achieve synchronous zoom feed , high magnification and simple overall structure

Inactive Publication Date: 2019-06-25
NINGBO INST OF TECH ZHEJIANG UNIV ZHEJIANG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] 1. Use more flexible hinges to achieve magnification, the structure is more complicated, and the system requirements are higher
[0006] 2. The magnification of the general displacement amplification mechanism is not enough to meet the needs of practical applications

Method used

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  • Double-degree-of-freedom electro-hydraulic controlled micro-displacement system
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  • Double-degree-of-freedom electro-hydraulic controlled micro-displacement system

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Embodiment Construction

[0030] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0031] refer to Figure 1 to Figure 3 , the present invention discloses a two-degree-of-freedom electro-hydraulic control micro-displacement system, which has a plate-shaped symmetrical structure as a whole, including a base 10 and an actuator 20 in the shape of a "mountain". The actuator 20 also has a rod-type symmetrical structure as a whole. The base 10 includes support arms 11 on both sides and a boss 12 in the middle, and recesses are provide...

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Abstract

The invention discloses a double-degree-of-freedom electro-hydraulic controlled micro-displacement system, which comprises a base having an epsilon type structure and an actuator, wherein the base comprises support arms located at two sides and a boss located in the middle; recesses are arranged between the two support arms and the boss; two ends of the actuator are hinged to the two support armsthrough second flexible hinges respectively; positions, corresponding to the two recesses, on the actuator are provided with first flexible hinges respectively; the recess of the base is provided withan electro-hydraulic amplification module; and the electro-hydraulic amplification module comprises an outer cylinder sleeve, a variable section cylinder, a plug sleeve, a main driving device and anauxiliary driving device. The micro-displacement system can achieve accurate displacement feed and can achieve precise positioning, and under micro-displacement conditions, the service life of the flexible hinge structure can be prolonged.

Description

technical field [0001] The invention belongs to the technical field of fluid pressure actuators, and in particular relates to a two-degree-of-freedom electro-hydraulic control micro-displacement system. Background technique [0002] The micro-positioning platform is the core component of precision testing and manufacturing equipment, and is widely used in the fields of biomedicine, micro-manufacturing, and scanning electron microscopy. In terms of driving form, most existing micro-positioning platforms are driven by piezoelectric ceramics, because piezoelectric ceramics have the advantages of high resolution, large bandwidth, high stiffness and compact structure. However, the main disadvantage of piezoelectric ceramic drive is the small stroke, which is difficult to meet the large stroke requirements of modern testing and processing. To meet this requirement, common methods can be divided into two categories. The first category is the use of mechanical displacement amplifi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B7/02H02N2/00H02N2/04H02N2/02
Inventor 刘毅盛一峥陈远流华顺明徐巧宁王平
Owner NINGBO INST OF TECH ZHEJIANG UNIV ZHEJIANG
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