Ultra-small and highly sensitive magnetic sensor

A magnetic sensor, ultra-miniature technology, applied to devices that apply electro-magnetic effects, magnetic field measurement using electromagnetic devices, instruments, etc., can solve the problems of reduced detection sensitivity and difficulty in miniaturization of detection sensitivity

Active Publication Date: 2022-02-15
ASAHI INTECC CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to realize the installation in the bio-introduction device, the smaller the size of the sensor, the better, but the detection sensitivity decreases inversely proportional to it, so it is difficult to miniaturize while maintaining the necessary detection sensitivity

Method used

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  • Ultra-small and highly sensitive magnetic sensor
  • Ultra-small and highly sensitive magnetic sensor
  • Ultra-small and highly sensitive magnetic sensor

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Experimental program
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Effect test

Embodiment

[0082] figure 1 A plan view of the GSR sensor and the GSR sensor element provided by the embodiment is shown, figure 2 A sectional view along line A1-A2 of the plan view is shown, image 3 A cross-sectional view along line B1-B2 is shown, and an embodiment of the present invention will be described below.

[0083] Here, the structure of the GSR sensor, the structure of the elements, and the electronic circuit are all based on the above-mentioned embodiments.

[0084] The dimensions of the element 1 are 0.10 mm in width and 0.40 mm in length. In terms of thickness, the thickness 40 of the ASIC 4 is 50 μm, the thickness 14 of the insulating protective film 10 a and the substrate film 10 b is 8 μm, and the thickness of the convex part of the element is 2 μm. The total thickness of the sensor is 60 μm.

[0085] In the central part of the element 1, a groove 11 with a width of 20 μm and a depth of 3 μm is formed on the substrate film 10b so that two magnet wires (21 and 22) can...

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Abstract

In order to provide an ultra-small high-sensitivity magnetic sensor composed of a magnetic field detection element integrally formed with the ASIC, the present invention sets the thickness of the substrate film (10b) formed on the upper surface of the insulating protective film (10a) of the ASIC (4) to 1 to 1. 20 μm, a groove (11) with a depth of 1 to 10 μm is provided on the substrate film (10b), and the element (1) is formed by embedding part or all of the coil along the surface of the groove (11), and the element (1 ) and the electrode of ASIC (4) are electrically connected through the through-hole type electrode junction part that penetrates the insulating protective film (10a) and the substrate film (10b), and the thickness of the element part from the surface of the ASIC (4) is set to be 20 μm or less .

Description

technical field [0001] The present invention relates to a technology for ultraminiaturizing the size and thickness of a GSR sensor by integrally forming a GSR element with an application specific integrated circuit (hereinafter referred to as ASIC). [0002] Among them, the GSR sensor is a highly sensitive micro-magnetic sensor based on the ultra-high-speed spin rotation effect (English expression: GHz Spin Rotation effect). Background technique [0003] High-sensitivity micro-magnetic sensors, including horizontal FG sensors, vertical FG sensors, Hall sensors, GMR sensors, TMR sensors, MI sensors, GSR sensors and high-frequency carrier sensors, etc. Currently, these sensors are widely used in smartphones, automobiles, medicine and robotics. Among them, the GSR sensor (Patent Document 1) has attracted attention because it is relatively excellent in sensitivity and size. [0004] Currently, researches on mounting a magnetic sensor on a device introduced into a living body s...

Claims

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Application Information

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Patent Type & AuthorityPatents(China)
IPC IPC(8): G01R33/02H01L43/00H10N50/01
CPCG01R33/06G01R33/063H10N59/00G01R33/0283H10B61/00H10N50/01
Inventor本蔵义信本蔵晋平工藤一恵田迈淳一菊池永喜
OwnerASAHI INTECC CO LTD