The invention relates to a
system (1) and a method for carrying out process steps using and / or on objects, at least partially under clean room conditions, wherein: the
system (1) comprises a clean room structure (10); the clean room structure (10) comprises a housing (20), an
introduction device and a
discharge device; a main space (201) of the housing (20) is separated from an environment and the clean room condition can be met in the main space (201) of the housing (20) of the clean room structure; the
system (1) comprises a plurality of process chambers (14, 15, 16, 17); the process chambers (14, 15, 16, 17) each have a chamber interior (140, 150, 160, 170) and an apparatus arranged in the chamber interior (140, 150, 160, 170) for carrying out a process step; at least one interface (152, 162) with the main space (201) is provided; in a connected state of the chamber interior (140, 150, 160, 170), the relevant chamber interior (140, 150, 160, 170) is connected to the main space (201) via the at least one interface (152, 162) in order to, in particular directly, move objects between the chamber interior (140, 150, 160, 170) and the main space (201); and the clean room condition of the main space (201) can be met at least in the connected state in the relevant chamber interior (140, 150, 160, 170).