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38results about How to "Formed satisfactorily" patented technology

Exposure apparatus and device fabricating method

InactiveUS20060250593A1Prevent outflowPrevent degradation in exposure and measurement accuracySemiconductor/solid-state device manufacturingPhotomechanical exposure apparatusEngineeringImage plane
The present invention is an exposure apparatus that exposes a substrate through a projection optical system and a liquid, comprising: a first nozzle member, which is provided in the vicinity of the image plane side of the projection optical system, that has a supply port that supplies the liquid and a first recovery port that recovers the liquid; and a second nozzle member, which is provided on the outer side of the first nozzle member with respect to a projection area of the projection optical system, that has a second recovery port, which recovers the liquid, that is separate from the first recovery port. The first nozzle member and the second nozzle member are mutually independent members.
Owner:NIKON CORP

Stage apparatus, exposure apparatus, and exposure method

A stage apparatus PST is provided with a holder PH, which has a substrate holding surface 33A that holds a substrate P; a stage 52, which supports and moves the holder PH; and a recovery apparatus 60, which is disposed in the vicinity of the holder PH and has lyophilic parts 3, 5 of which at least a part of each is lyophilic, that uses the lyophilic parts 3, 5 to recover a liquid 1. As a result, the infiltration of liquid into the space between the substrate and the holder is prevented, even if performing an exposure treatment by filling the space between a projection optical system and the substrate with the liquid.
Owner:NIKON CORP

Zeolite membrane support and zeolite composite membrane

A zeolite membrane support for supporting a zeolite membrane includes a metal substrate having a metal oxide layer at its surface. Preferably, the metal oxide layer has a thickness in the range of 1 nm to 10 μm and comprises chromia, silica, or alumina. Preferably, the metal substrate is porous, having a mean pore size in the range of 10 nm to 50 μm, and comprises an iron-based metal. A zeolite composite membrane includes the zeolite membrane support and a zeolite membrane which includes an external zeolite layer lying over the surface at and / or an internal zeolite layer lying in the pores at the metal oxide layer side of the zeolite membrane support. The zeolite membrane preferably has a composition satisfying the relationship SiO2 / Al2O3≦10.
Owner:KOBE STEEL LTD

Substrate processing method

A substrate processing method includes a substrate holding step of holding a substrate horizontally, a liquid droplet discharging step of making liquid droplets of an organic solvent, formed by mixing the organic solvent and a gas, be discharged from a double-fluid nozzle toward a predetermined discharge region within an upper surface of the substrate, and a liquid film forming step, executed before the liquid droplet discharging step, of supplying the organic solvent to the double fluid nozzle without supplying the gas to discharge the organic solvent in a continuous stream mode from the double-fluid nozzle to form a liquid film of the organic solvent covering the discharge region on the upper surface of the substrate.
Owner:DAINIPPON SCREEN MTG CO LTD

Apparatus for forming a composite structure body

An apparatus for manufacturing a composite structure body is provided which forms structure body having the constitution in which the crystals of more than one type of brittle material are dispersed and having novel properties without involving a heating / sintering process. The apparatus includes an aerosol generator configured to generate an aerosol. The aerosol is generated through dispersing fine particles of more than one type of brittle material, or dispersing composite fine particles, in a gas. The apparatus also includes a nozzle configured to spray the aerosol, a classifier configured to classify the brittle material fine particles in the aerosol, and a disintegrating machine for disintegrating agglomerations of the brittle material fine particles in the aerosol. The composite structure body is manufactured in reduced pressure conditions by bombarding a substrate with the aerosol at a high velocity, whereby at least one of crystals and microstructures of said brittle materials are dispersed.
Owner:TOTO LTD +1

Photomask

The photomask of this invention includes, on a transparent substrate, a semi-shielding portion having a transmitting property against exposing light, a transparent portion having a transmitting property against the exposing light and surrounded with the semi-shielding portion, and an auxiliary pattern surrounded with the semi-shielding portion and provided around the transparent portion. The semi-shielding portion and the transparent portion transmit the exposing light in an identical phase with respect to each other. The auxiliary pattern transmits the exposing light in an opposite phase with respect to the semi-shielding portion and the transparent portion and is not transferred through exposure.
Owner:PANASONIC CORP

Paste dispenser for applying paste containing fillers using nozzle with pin and application method using the same

A pin (125) is moved down in a nozzle (121), the end of paste (101) protruded from the discharge opening (122) of the nozzle (121) to a target object (102) is brought into contact with the target object (102), and the pin (125) is moved away from the discharge opening (122) to divide the paste in contact with the target object.
Owner:PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD

Curable resin composition, composition for forming solder resist, dry film and printed wiring board, and laminate and process for preparing the same

The present invention provides a curable resin composition that can provide a cured material excellent in insulation reliability while maintaining adhesiveness and provide a composition for forming a solder resist, a dry film and a printed wiring board, a laminate having a resin insulating layer excellent in insulation reliability while maintaining adhesiveness, a dry film for forming this and a process for preparing a laminate using the dry film. The curable resin composition contains (A) an imidazole-isocyanate adduct, (B) a carboxyl group-containing resin and (C) a thermosetting resin. The above laminate has a substrate and a plurality of resin insulating layers formed on the substrate, in which one of the plural resin insulating layers in contact with the substrate is a layer formed of the curable resin composition.
Owner:TAIYO INK MFG

Image recording apparatus and method

An image recording apparatus for exposing a photosensitive material includes two pairs of nip rollers. One pair of nip rollers is disposed upstream from a position at which the photosensitive material is exposed, and the other pair of nip rollers is disposed downstream from the exposure position. When a leading edge of the photosensitive material passes through the upstream pair of nip rollers, both pairs of nip rollers are moved into a position at which to nip the photosensitive material to prevent the photosensitive material from becoming jammed. When the leading edge of the photosensitive material passes through the downstream pair of nip rollers, the pairs of nip rollers are moved out of the nipping position to allow edges substantially parallel to a conveyance path of the photosensitive material to be aligned in the direction substantially orthogonal to the conveyance path.
Owner:FUJIFILM CORP +1

Liquid immersion member, immersion exposure apparatus, liquid recovering method, device fabricating method, program, and storage medium

A liquid immersion member is disposed inside an immersion exposure apparatus and at least partly around an optical member and around an optical path of exposure light that passes through a liquid between the optical member and an object. The liquid immersion member comprising: a first member, which has a recovery port that recovers at least some of the liquid from a space above the object; a recovery passageway, wherein the liquid recovered via the recovery port flows; a second member, which faces the recovery passageway and has a first discharge port that is for discharging the liquid from the recovery passageway; and a third member, which faces the recovery passageway and has a second discharge port that is for discharging a gas from the recovery passageway. The second member comprises a first portion and a second portion, which is disposed at a position higher than the first portion is and is capable of discharging a greater amount of the liquid than the first portion is.
Owner:NIKON CORP

Coating composition and use thereof

An alternating current type plasma display with front and back facing substrates with a gas discharge space between the substrates and a dielectric layer-covered electrode pair on at least one substrate, the dielectric layer having thereon a protective layer formed by coating the dielectric layer with a coating liquid substantially including a partial hydrolyzate derived from an alkaline earth metal compound having a hydrolyzable reaction site and heating the coating.
Owner:DAI NIPPON PRINTING CO LTD

METHOD FOR FORMING CONDUCTIVE PATTERN BY DIRECT RADIATION OF ELECTROMAGNETIC WAVE, AND RESIN STRUCTURE HAVING CONDUCTIVE PATTERN THEREON (As Amended)

Provided are a method for forming conductive pattern by direct radiation of an electromagnetic wave capable of forming fine conductive patterns on various kinds of polymer resin products or resin layers by a simplified process, and appropriately implementing the polymer resin products having white color or various colors, and the like, even without containing specific inorganic additives in the polymer resin itself, and a resin structure having the conductive pattern formed therefrom.The method for forming the conductive pattern by direct radiation of the electromagnetic wave includes: forming a first region having a predetermined surface roughness by selectively radiating the electromagnetic wave on a polymer resin substrate containing titanium dioxide (TiO2); forming a conductive seed on the polymer resin substrate; forming a metal layer by plating the polymer resin substrate having the conductive seed formed thereon; and removing the conductive seed and the metal layer from a second region of the polymer resin substrate, wherein the second region has surface roughness smaller than that of the first region.
Owner:LG CHEM LTD

Liquid immersion member, immersion exposure apparatus, liquid recovering method, device fabricating method, program, and storage medium

A liquid immersion member is disposed inside an immersion exposure apparatus and at least partly around an optical member and an optical path of exposure light that passes through a liquid between the optical member and an object. The liquid immersion member comprises: a first member, which has a recovery port that recovers at least some of the liquid from the space above the object; a recovery passageway, wherethrough the liquid recovered via the recovery port flows; a discharge part, which has a first discharge port for discharging the liquid from the recovery passageway and a second discharge port for discharging a gas from the recovery passageway, that separately discharges the liquid and the gas from the recovery passageway; and a hindering part, which hinders the liquid in the recovery passageway from contacting the second discharge port.
Owner:NIKON CORP

Film with alignment film and optical device

A film with alignment film which stably causes liquid crystal alignment and is excellent in adhesion between its constituting layers so as to give a high endurance and an excellent re-workability, and further to provide an optical device using the same. The film with alignment film contains at least a resin substrate and an alignment film, wherein the film is provided with a photocurable resin layer between the resin substrate and the alignment film, the photocurable resin layer being formed by use of a photo-cleaving type photopolymerization initiator. The optical device contains at least a resin substrate, an alignment film, and an optically functional layer, wherein the device is provided with a photocurable resin layer between the resin substrate and the alignment film, the photocurable resin layer being formed by use of a photo-cleaving type photopolymerization initiator.
Owner:DAI NIPPON PRINTING CO LTD

Aluminum plating apparatus and method for producing aluminum film using same

The invention offers an aluminum-plating apparatus that can satisfactorily form an aluminum plating even on the surface of a base body that has a surface on which an insulating or poorly conductive metal oxide film or the like is formed. The aluminum-plating apparatus electrodeposits aluminum onto a base body by conveying the base body in a plating bath. The plating bath is divided into a first electrolysis chamber and a second electrolysis chamber by a partition plate in this order from the upstream side in the conveying direction for the base body. In the first electrolysis chamber, a negative electrode provided in the chamber is electrically connected with the base body such that the base body acts as a positive electrode. In the second electrolysis chamber, a positive electrode provided in the chamber is electrically connected with the base body such that the base body acts as a negative electrode.
Owner:SUMITOMO ELECTRIC IND LTD

Laser processing device

The present invention is a laser processing device wherein adhesion of fumes to a lens can be effectively avoided. The laser processing device is provided with a laser scanner provided with protective glass on a laser output opening, and a cylindrical member having a through path through which the laser output via the protective glass passes formed on the center side in the direction of the radius. A cylindrically shaped filter is disposed on an inside wall part of the cylindrical member facing the through path. The cylindrical member discharges a gas into the through path from the filter.
Owner:HONDA MOTOR CO LTD

Image forming apparatus

An image forming apparatus including an image bearing body bearing an image, a transferring member being capable of contacting the image bearing body and transferring an image on the image bearing body to a transferring material when a voltage is applied thereto, and control portion for controlling the voltage applied to the transferring member,wherein the control portion determines the value of a reference voltage required for passing a current of a predetermined value appropriate to the type of transferring material through the transferring member contacting the image bearing body, and applies to the transferring member a transferring voltage of a value determined by adding to the reference voltage value an addition voltage value appropriate to the type of transferring material at the time when the image is transferred to the transferring material.
Owner:CANON KK

Welding apparatus and welding method

A welding apparatus includes a first electrode tip; a second electrode tip opposing the first electrode tip; and an electrically conductive part which is provided so as to be freely interposed between the second electrode tip and a work and ensures electrical conduction between the second electrode tip and the work when the electrically conductive part is interposed between the second electrode tip and the work, the electrically conductive part including an electrically conductive member one side of which opposes the work with a presence of a void space from the work when the electrically conductive member is interposed between the second electrode tip and the work, and against which the second electrode tip is abutted on another side thereof, and a pair of electrically conductive abutment members which are provided integrally with the electrically conductive member in such a manner as to extend toward the work, and distal ends of which are abutted against the work, a position of abutment of the electrically conductive member against the second electrode tip being positioned between the pair of abutment members.
Owner:HONDA MOTOR CO LTD

Film with alignment film and optical device

A film with alignment film which stably causes liquid crystal alignment and is excellent in adhesion between its constituting layers so as to give a high endurance and an excellent re-workability, and further to provide an optical device using the same. The film with alignment film contains at least a resin substrate and an alignment film, wherein the film is provided with a photocurable resin layer between the resin substrate and the alignment film, the photocurable resin layer being formed by use of a photo-cleaving type photopolymerization initiator. The optical device contains at least a resin substrate, an alignment film, and an optically functional layer, wherein the device is provided with a photocurable resin layer between the resin substrate and the alignment film, the photocurable resin layer being formed by use of a photo-cleaving type photopolymerization initiator.
Owner:DAI NIPPON PRINTING CO LTD
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