Static sampling introduction device and method of calibrating pressure leak hole

A positive pressure leak and calibration device technology, applied in the field of measurement, can solve the problems of low helium partial pressure, long accumulation time, large measurement uncertainty, etc.

Active Publication Date: 2012-06-13
NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The disadvantage of this method is that when the calibration leak rate is 1×10 -7 Pam 3 /s positive pressure leak, the required accumulation time is too long (usually 8 hours of accumulation time)...

Method used

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  • Static sampling introduction device and method of calibrating pressure leak hole
  • Static sampling introduction device and method of calibrating pressure leak hole
  • Static sampling introduction device and method of calibrating pressure leak hole

Examples

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Embodiment 1

[0041] Such as figure 1 As shown, a positive pressure leak calibration device for static sampling, said device includes: calibrated leak hole 1, valve one 2, capacitance film gauge one 3, helium cylinder 4, valve two 5, capacitance film gauge two 6. Valve three 7, standard volume one 8, valve four 9, valve five 10, monitoring gauge 11, quadrupole mass spectrometer 12, calibration chamber 13, valve six 14, getter pump 15, valve seven 16, molecular pumping Gas unit one 17, valve eight 18, standard volume two 19, molecular pump exhaust unit two 20, valve nine 21, nitrogen cylinder 22, valve ten 23.

[0042] Among them, the calibrated leak hole 1 is connected to the calibration chamber 13 through the valve one 2 and the valve five 10; Atmospheric pressure dry nitrogen is provided at the outlet; capacitive film gauge 13 is connected with valve 12 and valve 1023 for measuring the pressure at the outlet of calibrated leak hole 1; helium cylinder 4 passes through valve 25 and valve 3...

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PUM

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Abstract

The invention discloses a static sampling introduction device and a method of a calibrating pressure leak hole, which belong to the field of measurement. The device and the method utilize pumping performance of a non-evapotranspiration type getter pump and introduce helium accumulated by the calibrated pressure leak hole into a calibration chamber, and a helium ion flow signal is generated on a quadrupole mass spectrometer. Helium with known quantity is prepared and is introduced into the calibration chamber in the same method, a helium ion flow signal is generated on the quadrupole mass spectrometer, and leakage rate of the calibrated pressure leak hole is obtained through simple calculation. The method greatly shortens accumulative time for the pressure leak hole, simultaneously improves a helium partial pressure value in the calibration chamber and calibration efficiency, extends calibration lower limit, and enables pressure leak hole with leak rate value smaller than 1*10-7Pa m<3>/s to be accurately calibrated.

Description

technical field [0001] The invention relates to a static sampling positive pressure leak calibration device and method, in particular, the static sampling technology is used to realize a leak rate value less than 1×10 -7 Pam 3 The invention relates to a device and method for accurately calibrating a positive pressure leakage hole per second, belonging to the field of measurement. Background technique [0002] The calibration of positive pressure standard leaks (referred to as positive pressure leaks) is an important research direction in the field of vacuum measurement. The first-level vacuum metering station in my country adopts the quantitative gas dynamic comparison method to calibrate positive pressure leaks, and the calibration range is (1×10 -7 ~1×10 -4 )Pa m 3 / s. In practical applications, it is also necessary to use some leak rate values ​​less than 1×10 -7 Pam 3 / s positive pressure leak, the quantitative gas dynamic comparison method cannot accurately calib...

Claims

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Application Information

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IPC IPC(8): G01F25/00
Inventor 刘赐贤张涤新赵澜冯焱
Owner NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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