Semiconductor equipment alarm management system

An alarm management and semiconductor technology, which is applied in the field of semiconductor equipment alarm management system, can solve the problems of software development cost upgrade, inability to reuse abnormalities, and lack of unified management for exception handling

Active Publication Date: 2022-03-22
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Simultaneously, different control modules may run on one or more computers, and the shortcomings of the existing alarm exception processing methods are particularly obvious in this distributed computing, and they are not suitable for running in multiple computers (or running in one computer) The exception handling of multiple modules of ) lacks unified management, and at the same time, it is impossible to reuse various similar exceptions. The occurrence and processing methods of exceptions distributed on different modules cannot be uniformly scheduled. The software exception handling system also needs to be changed, which causes a lot of waste of existing resources and the inability to reuse software resources, resulting in an upgrade of software development costs
At the same time, according to the module's internal automatic processing of abnormal alarms, there will be a certain probability that program errors will lead to wrong processing methods, so that abnormal processing cannot be handled correctly, resulting in potential safety hazards and operational stability of the equipment.

Method used

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  • Semiconductor equipment alarm management system
  • Semiconductor equipment alarm management system
  • Semiconductor equipment alarm management system

Examples

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Embodiment

[0052] The present invention takes the semiconductor equipment 300mm vertical oxidation furnace as an example to analyze and illustrate, as figure 1 As shown, the software system of the 300mm vertical oxidation furnace is divided into three control modules, which are cluster control module 7 (Cluster Tools Controller), transmission control module 8 (Transfer Tools Controller) and process control module 9 (Process Module Controller). The cluster control module 7 is the central control system, which schedules and controls the transmission control module 8 and process control module 9; in the 300mm vertical oxidation furnace software system, the cluster control module 7, transmission control module 8 and process control Module 9 performs distributed configuration installation and management, that is, the three control modules can be installed on one computer, two computers, or three computers. In other embodiments of the present invention, in addition to a cluster control module ...

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Abstract

The present invention discloses an alarm management system for semiconductor equipment, comprising: multiple alarm clients and alarm servers, wherein the multiple alarm clients are respectively configured in multiple functional control modules of the semiconductor equipment for use in the Alarm information is generated when the semiconductor equipment is abnormal, and the alarm information is sent to the alarm server through a unified alarm interface; the alarm server is configured in the central control module of the semiconductor equipment and is used for displaying in the user interface The received alarm information. Realize the comprehensive management and scheduling of various alarm resources of semiconductor equipment, effectively utilize system resources and software development costs, and improve the security and stability of semiconductor equipment.

Description

technical field [0001] The invention relates to the technical field of semiconductors, and more specifically, to an alarm management system for semiconductor equipment. Background technique [0002] In the interactive management system, most of the alarm management methods used by the commonly used automation control systems are aimed at a specific module, and each module uses an alarm exception processing method within itself to achieve the purpose of system self-repair. [0003] In semiconductor equipment, the control system software of the same equipment often includes multiple different control modules. The multiple different control modules all use the same alarm system, but the multiple different control modules operate independently. Simultaneously, different control modules may run on one or more computers, and the shortcomings of the existing alarm exception processing methods are particularly obvious in this distributed computing, and they are not suitable for runn...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G08B25/08
CPCG08B25/08
Inventor 周法福黄扬君肖托
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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