Molecular pump dynamic balance adjusting device and method

Abstract

The invention provides a molecular pump dynamic balance adjusting device and method. The device comprises a magnetic levitation motor; a vacuum hood is mounted on one side of the magnetic suspension motor; the vacuum cover is connected to a mechanical pump through a vacuum pipeline; an impeller and an electromagnetic spindle are arranged in the vacuum cover; a spindle of the magnetic levitation motor is connected to one end of the electromagnetic spindle; the impeller is installed at the other end of the electromagnetic spindle; an upper radial bearing detection position and a lower radial bearing detection position are arranged on the electromagnetic spindle; a first dynamic balance weighting hole and a second dynamic balance weighting hole are formed in the end of the impeller; and a detection unit is arranged outside the vacuum cover and used for detecting the unbalance amount of the electromagnetic spindle and transmitting signals to an upper computer. According to the molecular pump dynamic balance adjusting device and the molecular pump dynamic balance adjusting method, the dynamic balance testing efficiency of the molecular pump is greatly improved, the precision is high, and a large amount of debugging time is saved.

Description

technical field [0001] The invention belongs to the field of vacuum obtaining equipment, and in particular relates to a molecular pump dynamic balance adjustment device and an adjustment method. Background technique [0002] The molecular pump is a high-precision precision instrument and a high-end product in the vacuum obtaining equipment. Its working principle is to hit the gas molecules in the working environment through the high-speed rotating impeller in a directional way, so that the gas molecules are discharged from the vacuum chamber according to the design requirements to obtain a clean vacuum. high vacuum environment. Therefore, the speed requirement of the molecular pump impeller is very high, and the linear velocity of the impeller edge must reach more than 400m / s. At the same time, the molecular pump is required not to have a large vibration, and the relative vibration of the pump port needs to be controlled within 0.1μm. Under this requirement, the dynamic bal...

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