A molecular pump dynamic balance adjustment device and adjustment method
A technology of adjustment device and adjustment method, applied in static/dynamic balance testing, measuring device, machine/structural component testing, etc., can solve the problems of low dynamic balance accuracy, long time consumption, and complicated operation of molecular pumps, and improve the The overall technical level, the effect of improving dynamic balancing efficiency and saving debugging time
Active Publication Date: 2021-07-09
TIANJIN EMAGING TECH
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Problems solved by technology
[0003] In view of this, the present invention aims to propose a molecular pump dynamic balance adjustment device to solve the problems of low precision molecular pump dynamic balance, complicated operation, and long time-consuming
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[0034] It should be noted that, in the case of no conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.
[0035] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", " The orientations or positional relationships indicated by "vertical", "horizontal", "top", "bottom", "inner" and "outer" are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and Simplified descriptions, rather than indicating or implying that the device or element referred to must have a particular orientation, be constructed and operate in a particular orientation, and thus should not be construed as limiting the invention. In addition, the terms "first", "second", etc. are used for descriptive purposes only, and should not be understood ...
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The invention provides a molecular pump dynamic balance adjustment device and adjustment method, comprising a magnetic levitation motor, a vacuum cover installed on one side of the magnetic levitation motor, the vacuum cover is connected to a mechanical pump through a vacuum pipeline, an impeller and an electromagnetic spindle are arranged inside the vacuum cover, and the magnetic levitation motor The main shaft is connected to one end of the electromagnetic main shaft, and the other end of the electromagnetic main shaft is installed with an impeller. The electromagnetic main shaft is provided with an upper radial bearing detection position and a lower radial bearing detection position, and the end of the impeller is provided with a first dynamic balance weighting hole and a second dynamic balance. Balance weighting hole, a detection unit is arranged outside the vacuum cover, and the detection unit is used to detect the unbalance of the electromagnetic spindle and transmit the signal to the upper computer. The molecular pump dynamic balance adjustment device and adjustment method of the present invention greatly improves the dynamic balance test efficiency of the molecular pump, has high precision, and saves a lot of debugging time.
Description
technical field [0001] The invention belongs to the field of vacuum obtaining equipment, and in particular relates to an adjustment method of a molecular pump dynamic balance adjustment device. Background technique [0002] The molecular pump is a high-precision precision instrument and a high-end product in the vacuum obtaining equipment. Its working principle is to hit the gas molecules in the working environment through the high-speed rotating impeller in a directional way, so that the gas molecules are discharged from the vacuum chamber according to the design requirements to obtain a clean vacuum. high vacuum environment. Therefore, the speed requirement of the molecular pump impeller is very high, and the linear velocity of the impeller edge must reach more than 400m / s. At the same time, the molecular pump is required not to have a large vibration, and the relative vibration of the pump port needs to be controlled within 0.1μm. Under this requirement, the dynamic bala...
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IPC IPC(8): G01M1/36
CPCG01M1/36
Inventor 项海铭洪申平沙宏磊俞天野王文建赵明杨沈虹李鲁楠
Owner TIANJIN EMAGING TECH