Bulk acoustic wave resonator, manufacturing method thereof, filter and radio frequency communication system

A technology of a bulk acoustic wave resonator and a manufacturing method, which is applied in the field of radio frequency communication, can solve the problems that high-performance radio frequency systems cannot be satisfied, and the quality factor cannot be further improved, and achieves the effects of improving acoustic wave loss, reducing loss and improving performance.

Active Publication Date: 2020-10-16
NINGBO SEMICON INT CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007]However, the quality factor (Q) of the cavity-type bulk acoustic wave resonator produced at present cannot be further improved, so it cannot meet the needs of high-performance radio frequency systems

Method used

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  • Bulk acoustic wave resonator, manufacturing method thereof, filter and radio frequency communication system
  • Bulk acoustic wave resonator, manufacturing method thereof, filter and radio frequency communication system
  • Bulk acoustic wave resonator, manufacturing method thereof, filter and radio frequency communication system

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Embodiment Construction

[0040] The technical solution of the present invention will be further described in detail below in conjunction with the drawings and specific embodiments. According to the following description, the advantages and features of the present invention will be clearer. It should be noted that the drawings are in a very simplified form and all use imprecise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention. Similarly, if the method described herein includes a series of steps, and the order of these steps presented herein is not necessarily the only order in which these steps can be performed, and some of the described steps may be omitted and / or some not described herein The other steps can be added to the method. In addition, the meaning of "staggered" between something and something in this article means that the two do not overlap in the cavity area, that is, the projections of the two on the...

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Abstract

The invention provides a bulk acoustic wave resonator, a manufacturing method thereof, a filter and a radio frequency communication system. A bottom electrode convex part and a top electrode concave part formed on the periphery of a piezoelectric resonance layer and suspended above a cavity can prevent transverse waves generated by a piezoelectric resonance layer from being transmitted to the periphery of the cavity and reflect the transverse waves back to an effective working area, so that sound wave loss is reduced, the quality factor of the resonator is improved, and finally the performanceof a device can be improved. Furthermore, the overlapping parts of a bottom electrode overlapping part and the cavity and the overlapping parts of a top electrode overlapping part and the cavity aresuspended, and the bottom electrode overlapping part and the top electrode overlapping part are mutually staggered, so that a parasitic parameter can be greatly reduced, the problems of electric leakage, short circuit and the like can be avoided, and the reliability of the device can be improved.

Description

Technical field [0001] The invention relates to the technical field of radio frequency communication, in particular to a bulk acoustic wave resonator, a manufacturing method thereof, a filter, and a radio frequency communication system. Background technique [0002] Radio frequency (RF) communications, such as those used in mobile phones, require radio frequency filters. Each radio frequency filter can pass the required frequency and limit all other frequencies. With the development of mobile communication technology, the amount of mobile data transmission has also risen rapidly. Therefore, under the premise that frequency resources are limited and as few mobile communication devices as possible should be used, increasing the transmission power of wireless power transmitting devices such as wireless base stations, micro base stations, or repeaters has become a problem that must be considered, and it also means that The power requirements of filters in the front-end circuits of m...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/15H03H9/17H03H9/46H03H9/54
CPCH03H9/15H03H9/174H03H9/46H03H9/462H03H9/547H03H2009/155H03H9/17H03H9/54H03H3/02
Inventor 罗海龙
Owner NINGBO SEMICON INT CORP
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