56 results about "Piezoelectric resonance" patented technology

An ignition system for a rocket engine utilizes the pressure energy in a propellant flow. The propellant flow generates an oscillating pressure force in a resonance system which is then transmitted to a piezoelectric system. The electrical pulses are utilized to generate a spark in an igniter system spark gap, resulting in ignition. Since the spark energy production is driven by the resonance of the propellant flow, a fully passive auto-ignition system is provided. Once ignition occurs, the resultant backpressure in the combustion chamber “detunes” the resonance phenomena and spark production stops. Furthermore, should the engine flame out, spark production would automatically resume as the propellant valves remain open thereby providing relight capability.

The invention provides an integrated structure of a crystal resonator and a control circuit, and an integration method thereof. A piezoelectric resonance sheet and a semiconductor chip are formed on the back surface of a device wafer, so that the semiconductor chip, a control circuit and a crystal resonator are arranged on the same device wafer. Thus, the integration degree of the crystal resonator can be improved, and parameters of the crystal resonator can be modulated on chip; compared with a traditional crystal resonator, the crystal resonator has the advantages that the size is smaller, and the power consumption of the crystal resonator can be reduced.

The invention provides an integrated structure of a crystal resonator and a control circuit, and an integration method thereof. A lower cavity is formed in a device wafer on which a control circuit isformed, an upper cavity is formed in a substrate, and the device wafer and the substrate are bonded by using a bonding process, so that a piezoelectric resonance piece is clamped between the device wafer and the substrate, and the integrated arrangement of the crystal resonator and the control circuit is realized. Moreover, the semiconductor chip can be further bonded to the back surface of the same device wafer, so the integration level of the crystal resonator is further improved, and parameters of the on-chip modulation crystal resonator are realized. Compared with a traditional crystal resonator, the crystal resonator has the advantages that the size is smaller, the power consumption of the crystal resonator can be reduced, the crystal resonator can be integrated with other semiconductor components more easily, and therefore the integration degree of the device can be improved.

The invention provides an integrated structure of a crystal resonator and a control circuit and an integration method thereof. A lower cavity is formed in a device wafer, and an upper cavity is formedin a substrate; the device wafer and the substrate are bonded by using a bonding process, so that a piezoelectric resonance sheet is clamped between the device wafer and the substrate, the lower cavity and the upper cavity are enabled to respectively correspond to two sides of the piezoelectric resonance sheet to form the crystal resonator, and the crystal resonator is enabled to be electricallyconnected with the control circuit, so the integrated arrangement of the crystal resonator and the control circuit can be realized. Compared with a traditional crystal resonator, the crystal resonatorhas the advantages that the size is smaller, the power consumption of the crystal resonator can be reduced, the crystal resonator can be integrated with other semiconductor components more easily, and therefore the integration degree of the device can be improved.

The invention relates to a high-precision sample turntable device based on an atomic force microscope, which includes a turntable main body, a sample mounting seat on the turntable main body, and a magnetic base for fixing the turntable main body; the turntable main body passes through the The magnetic base is fixed on the platform of the atomic force microscope scanner; the main body of the rotating stage includes a sample stage, a magnetic rotary encoder and two elliptical piezoelectric resonant motors. A plastic ring is fixed on the side of the sample stage, and the top of the elliptical piezoelectric resonant motor is connected to The plastic ring is in close contact, and two elliptical piezoelectric resonant motors are installed opposite to each other, one is used to push the plastic ring to move, and the other is used to pull the plastic ring to move in the opposite direction; the disk of the magnetic rotary encoder is installed on the sample stage. The device of the invention is suitable for providing high-precision angle rotation for samples under the condition of limited size space and limited weight of the atomic force microscope, which broadens the application occasion and research scope of the atomic force microscope.

The present invention relates to a curing process for a piezoelectric ceramics buzzing sheet in a buzzer. According to the curing process, a metal sheet is placed on a sheet suction mold, the sheet suction mold adsorbs the metal sheet, and silk-screen printing is adopted to print an anaerobic glue onto the upper surface of the metal sheet; a piezoelectric resonance sheet is placed on the metal sheet, and is bonded on the metal sheet through the anaerobic glue; the metal sheet and the piezoelectric resonance sheet bonded on the metal sheet are removed from the sheet suction mold, and are packaged by adopting a vacuum package bag; the vacuum package bag filled with the metal sheet and the piezoelectric resonance sheet is placed in ultra-high hydrostatic hydraulic equipment to carry out pressing curing, wherein the pressure of ultra-high hydrostatic hydraulic pressure is more than or equal to 120 MPa, and a pressure keeping time is 3-5 minutes; and the vacuum package bag is removed from the ultra-high hydrostatic hydraulic equipment, and is unpacked, the metal sheet and the piezoelectric resonance sheet are firmly bonded, and the curing process is completed. According to the present invention, the force applying on the product is uniform, the bonding force is stable and reliable, the curing time is short, the production efficiency is improved, the product is not deformed, and the frequency consistency is good.

While suppressing that a vibration of a piezo-electric element propagates to a substrate by devising the composition of an electro-conductive support body, the piezoelectric resonant component which secures electroconductivity and can maintain a fall-proof shock property is provided. The piezoelectric resonant component has a substrate 20 on the top surface of which pattern electrodes 21 and 22 are formed, and on the lower surface of which it has electrodes 8 and 9. It has a piezoelectric element 1 using the length vibration on the substrate 20. Electro-conductive support bodies 10 and 11 are fixed to the length direction center section of the lower surface electrodes of the piezoelectric element 1. The connection fixation of these support bodies 10 and 11 to the pattern electrodes 21 and 22 of the substrate 20 is performed by electro-conductive adhesives 12 and 13. The electro-conductive support bodies 10 and 11 include an urethane resin which contains an electro-conductive filler, making the rate of content of the electro-conductive filler 75-85 wt %.

The invention provides a resonant piezoelectric pump working at power frequency, which belongs to piezoelectric resonance devices. It includes an excitation system composed of piezoelectric ceramics, tuning fork vibrator, mass block, bolts, connectors, oval connecting pieces, upper pump body, intermediate body, lower pump body, pump cavity membrane, inlet valve, outlet valve, The pump body is composed of inlet tube plate and outlet tube plate. Driven by a commercial frequency power supply, the piezoelectric vibrator bends and deforms to produce a periodically changing inertial impact force, which acts on the membrane of the pump cavity through the connector and the elliptical connecting piece, thereby realizing the directional drive of the fluid.

The invention provides an integrated structure of a crystal resonator and a control circuit, and an integration method thereof. A lower cavity is formed in a device wafer on which a control circuit isformed, an upper cavity is formed in a substrate, and the device wafer and the substrate are bonded by using a bonding process, so that a piezoelectric resonance piece is clamped between the device wafer and the substrate, and the integrated arrangement of a crystal resonator and the control circuit is realized. Moreover, the semiconductor chip can be further bonded to the back surface of the same device wafer, so that the integration level of the crystal resonator is further improved, and parameters of the on-chip modulation crystal resonator are realized. Compared with a traditional crystalresonator, the crystal resonator has the advantages that the size is smaller, the power consumption of the crystal resonator can be reduced, the crystal resonator can be integrated with other semiconductor components more easily, and therefore the integration degree of the device can be improved.