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Bulk acoustic wave resonator, manufacturing method thereof, filter and radio frequency communication system

A technology of bulk acoustic wave resonator and manufacturing method, which is applied in the field of radio frequency communication, can solve the problems that the quality factor cannot be further improved, cannot meet the requirements of high-performance radio frequency systems, etc., and achieve the effects of improving acoustic wave loss, reducing parasitic parameters, and reducing losses

Active Publication Date: 2020-10-16
NINGBO SEMICON INT CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007]However, the quality factor (Q) of the cavity-type bulk acoustic wave resonator produced at pres

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  • Bulk acoustic wave resonator, manufacturing method thereof, filter and radio frequency communication system
  • Bulk acoustic wave resonator, manufacturing method thereof, filter and radio frequency communication system
  • Bulk acoustic wave resonator, manufacturing method thereof, filter and radio frequency communication system

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Embodiment Construction

[0037] The technical solutions of the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the following description. It should be noted that, the accompanying drawings are all in a very simplified form and in inaccurate scales, and are only used to facilitate and clearly assist the purpose of explaining the embodiments of the present invention. Similarly, if a method described herein includes a series of steps, the order of the steps presented herein is not necessarily the only order in which the steps may be performed, and some of the steps described may be omitted and / or some not described herein Additional steps can be added to this method. In addition, the meaning of “staggering” between something and something in this article means that the two do not overlap in the cavity area, that is, the projections of the t...

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Abstract

The invention provides a bulk acoustic wave resonator, a manufacturing method thereof, a filter and a radio frequency communication system. A bottom electrode concave part and A top electrode convex part formed on the periphery of a piezoelectric resonance layer and suspended above a cavity can prevent transverse waves generated by the piezoelectric resonance layer from being transmitted to the periphery of the cavity, and reflect the transverse waves back to an effective working area, so that sound wave loss is reduced, the quality factor of the resonator is improved, and finally the performance of a device can be improved. Furthermore, the overlapping parts of a bottom electrode overlapping part and the cavity and the overlapping parts of a top electrode overlapping part and the cavity are suspended, and the bottom electrode overlapping part and the top electrode overlapping part are mutually staggered, so that a parasitic parameter can be greatly reduced, the problems of electric leakage, short circuit and the like can be avoided, and the reliability of the device can be improved.

Description

technical field [0001] The present invention relates to the technical field of radio frequency communication, in particular to a bulk acoustic wave resonator, a method for manufacturing the same, a filter, and a radio frequency communication system. Background technique [0002] Radio frequency (RF) communications, such as those used in mobile phones, require the use of radio frequency filters, each of which passes the desired frequency and restricts all others. With the development of mobile communication technology, the amount of mobile data transmission is also rising rapidly. Therefore, under the premise of limited frequency resources and the use of as few mobile communication devices as possible, improving the transmission power of wireless power transmitting devices such as wireless base stations, micro base stations or repeaters has become a problem that must be considered. The requirements for filter power in the front-end circuits of mobile communication equipment ...

Claims

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Application Information

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IPC IPC(8): H03H9/15H03H9/17H03H9/46H03H9/54
CPCH03H9/15H03H9/174H03H9/46H03H9/462H03H9/547H03H2009/155H03H9/17H03H9/54
Inventor 罗海龙
Owner NINGBO SEMICON INT CORP
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