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158results about How to "Suppress coupling" patented technology

Capacitive micromachined tuning fork gyroscope

The invention provides a capacitive micromachined tuning fork gyroscope. The gyroscope is the symmetrical dual-mass structural gyroscope, comprising a substrate and a framework arranged in the centre of the substrate, wherein the middle of the framework is provided with a framework beam perpendicular to the framework; two detection mass blocks are symmetrically arranged in the framework with the framework beam as a symmetry axis, and four corners of each detection mass block are connected with the framework and the framework beam through at least four drive beams; decoupling drive comb capacitors are respectively arranged at both ends of each detection mass block in the direction of a vertical axis; detection comb capacitors are symmetrically arranged on both outer sides of the framework in the direction of a horizontal axis; at least four detection beams are arranged on both outer sides of the framework in the direction of the vertical axis; and the detection beams are distributed symmetrically relative to the vertical axis and the horizontal axis and are fixed on the substrate through corresponding anchor points. According to the capacitive horizontal-axis micromachined tuning fork gyroscope provided by the invention, the mechanical coupling between the detection mode and the driving mode of the micromachined tuning fork gyroscope can be solved easily and effectively.
Owner:PEKING UNIV

Horizontal shaft micro-mechanical tuning fork gyroscope adopting electrostatic balance comb tooth driver

The invention relates to a horizontal shaft micro-mechanical tuning fork gyroscope adopting an electrostatic balance comb tooth driver, which comprises a substrate, more than one group of driving capacitors, two detection mass blocks, a driving folded beam, a frame, more than one group of detection capacitors, a detection folded beam and an anchor point, wherein one side of each group of driving capacitors is connected with the adjacent detection mass block, the detection mass blocks are fixedly connected with the frame through the driving folded beam, the frame is respectively connected with the detection capacitors and the detection folded beam, and the detection folded beam is connected with the anchor point fixed on the substrate; and the other sides of each group of driving capacitors are sequentially connected to the detection folded beam through the driving folded beam and the frame, and the detection folded beam is connected with the anchor point fixed on the substrate. Because adopted driving movable comb teeth and adopted driving fixed comb teeth have the same thickness along the Z-axis direction, have different positions and are symmetrically distributed, the invention realizes the purpose of effectively inhibiting the coupling from a detection mode to a driving mode, thereby improving the sensitivity and the resolution of the gyroscope. The invention can be widely applied to detection of rotational angular speed of objects in various fields.
Owner:PEKING UNIV
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