Capacitive micromachined tuning fork gyroscope

Abstract

The invention provides a capacitive micromachined tuning fork gyroscope. The gyroscope is the symmetrical dual-mass structural gyroscope, comprising a substrate and a framework arranged in the centre of the substrate, wherein the middle of the framework is provided with a framework beam perpendicular to the framework; two detection mass blocks are symmetrically arranged in the framework with the framework beam as a symmetry axis, and four corners of each detection mass block are connected with the framework and the framework beam through at least four drive beams; decoupling drive comb capacitors are respectively arranged at both ends of each detection mass block in the direction of a vertical axis; detection comb capacitors are symmetrically arranged on both outer sides of the framework in the direction of a horizontal axis; at least four detection beams are arranged on both outer sides of the framework in the direction of the vertical axis; and the detection beams are distributed symmetrically relative to the vertical axis and the horizontal axis and are fixed on the substrate through corresponding anchor points. According to the capacitive horizontal-axis micromachined tuning fork gyroscope provided by the invention, the mechanical coupling between the detection mode and the driving mode of the micromachined tuning fork gyroscope can be solved easily and effectively.

Description

technical field [0001] The invention relates to the field of micro-electromechanical, in particular, to a capacitive micro-mechanical tuning fork gyroscope. Background technique [0002] The micro-mechanical tuning fork gyroscope is a micro-inertial device developed based on micro-electro-mechanical system (MEMS, Micro Electro Mechanical System) technology for measuring angular velocity. It has significant advantages such as small size, light weight, low cost, low power consumption and easy integration, etc. It can be applied to short-time working tactical missiles (such as air-to-air combat tactical missiles) and guidance systems for intelligent artillery shells, and automatic control of light and small aircraft The system, the stabilization system of the radar antenna, and the combination with the global positioning system constitute a high-precision navigation and positioning system. In addition, it can also be applied in many other fields, such as automobiles, robots, c...

AI Technical Summary

Problems solved by technology

For horizontal axis gyroscopes, due to the out-of-plane motion involved, it is more difficult to achieve double decoupling directly through structural design such as adding decoupling beams.

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