Horizontal shaft micro-mechanical tuning fork gyroscope adopting electrostatic balance comb tooth driver
A tuning fork gyro and driver technology, which is applied in the direction of gyro effect for speed measurement, gyroscope/steering sensing equipment, instruments, etc., can solve the problems of affecting gyro performance, increasing device cost, and detecting modal damping, so as to improve sensitivity and resolution, reduce electromechanical coupling, and improve linearity
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[0017] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.
[0018] like figure 1 As shown, the present invention is a Y-axis micromachined tuning fork gyroscope, which includes a substrate 1, more than one set of drive capacitors 2, two detection masses 3, a drive folded beam 4, a frame 5, and more than one set of detection capacitors 6, Detect folded beam 7 and anchor point 8. One side of each group of drive capacitors 2 is connected to the respective adjacent proof mass 3, and each proof mass 3 is fixedly connected to the frame 5 by driving the folding beam 4, and the frame 5 is respectively connected to the detection capacitor 6 and the detection folding beam 7 to detect folding The beam 7 is fixedly connected to the anchor point 8, and the anchor point 8 is fixed on the substrate 1; the other side of each group of driving capacitors 2 is sequentially connected to the detection folded beam 7 by driving the...
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