Horizontal shaft micro-mechanical tuning fork gyroscope adopting electrostatic balance comb tooth driver

Abstract

The invention relates to a horizontal shaft micro-mechanical tuning fork gyroscope adopting an electrostatic balance comb tooth driver, which comprises a substrate, more than one group of driving capacitors, two detection mass blocks, a driving folded beam, a frame, more than one group of detection capacitors, a detection folded beam and an anchor point, wherein one side of each group of driving capacitors is connected with the adjacent detection mass block, the detection mass blocks are fixedly connected with the frame through the driving folded beam, the frame is respectively connected with the detection capacitors and the detection folded beam, and the detection folded beam is connected with the anchor point fixed on the substrate; and the other sides of each group of driving capacitors are sequentially connected to the detection folded beam through the driving folded beam and the frame, and the detection folded beam is connected with the anchor point fixed on the substrate. Because adopted driving movable comb teeth and adopted driving fixed comb teeth have the same thickness along the Z-axis direction, have different positions and are symmetrically distributed, the invention realizes the purpose of effectively inhibiting the coupling from a detection mode to a driving mode, thereby improving the sensitivity and the resolution of the gyroscope. The invention can be widely applied to detection of rotational angular speed of objects in various fields.

Description

technical field

[0001] The invention relates to a micromechanical gyroscope, in particular to a horizontal axis micromechanical tuning fork gyroscope using an electrostatic balance comb driver. Background technique

[0002] Micromachined gyroscopes are gyroscopes with characteristic dimensions in the order of microns processed by micromachining technology. They are small in size, light in weight, low in cost, low in power consumption, and easy to integrate. Therefore, they have extensive and urgent market demands, and strong market drivers have greatly promoted The rapid development of micro-mechanical gyroscopes has been successfully used in civil applications such as automobiles and consumer electronics, as well as military applications such as spacecraft and tactical missiles. With the expansion of application fields and the improvement of use requirements, monolithic integration of multi-sensitive axis inertial sensors and micro-inertial measurement units has been put on...

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