A thin film piezoelectric sonic sensor, comprising: a substrate layer (2), a ground
electrode layer (3), and a piezoelectric layer (4) which are stacked. At least one
transducer (5) is provided on the side of the piezoelectric layer (4) distant from the ground
electrode layer (3); phononic crystals (1) at least formed in the piezoelectric layer (4) are correspondingly provided on the two sides of the
transducer (5), and the resonant frequency of the thin film piezoelectric sonic sensor is located in a
band gap of the phononic crystals (1). According to the thin film piezoelectric sonic sensor, the phononic crystals (1) are at least provided on the piezoelectric layer (4), the
mechanical vibration stability of the piezoelectric layer (4) is improved, the sonic wave
reflectivity is improved, the
energy loss of sonic
wave transmission is lowered, and the quality factor of the sensor is improved. A phononic
crystal (1) comprises a matrix and a scatterer formed on the matrix; the matrix is formed by at least two stacked
dielectric layers; materials of any one of the
dielectric layers are different from those of other
dielectric layers. The phononic
crystal (1) can effectively reduce the sonic wave
energy loss, and effectively improve the quality factor of the sensor when the phononic
crystal is applied to the thin film piezoelectric sonic sensor.