The invention relates to the technical field of
semiconductor packaging, in particular to a glass substrate with a built-in
inductor, a packaging structure and a preparation method of the packaging structure. The glass substrate with the built-in
inductor comprises the glass core layer and the
inductor arranged in the glass core layer, three-dimensional integration of the inductor in the vertical direction is achieved, the thickness of a packaged product is greatly reduced, meanwhile, a spiral conductor structure in the inductor is wrapped, fixed and protected by the glass core layer, and the packaging quality is improved. The mechanical
shock resistance, the vibration resistance and the bending resistance of the glass substrate are far better than those of a packaging process of a surface-mounted
substrate surface, and the strength of the glass substrate with the built-in inductor is improved. Furthermore, a plurality of
layers of glass substrates with built-in inductors are bonded to obtain a multi-turn inductor, and under the constraint of
miniaturization, a high
inductance value is realized, so that the utilization efficiency of the packaging structure on a
magnetic field is higher, and the
energy transfer or
energy storage capability is stronger. And the glass substrate with the built-in inductor only needs to be produced on a traditional glass substrate, so that the risk, time and cost of
process development are greatly reduced.