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115 results about "Superconducting circuits" patented technology

Preparation method of superconductive Josephson junction

The present invention discloses a preparation method of a superconductive Josephson junction. belonging to the field of superconducting circuit elements. The method comprises the steps of: 1) performing preprocessing of a substrate, and obtaining a clean substrate; 2) performing electron beam exposure: coating electron beam glue on the substrate, and employing an electron beam exposure device to expose an area A and a area B on the substrate, wherein an area C is arranged at the intersection of the area A and the area B; 3) performing development: putting a container holding developing solventinto liquid, monitoring a temperature of the developing solvent, immersing the substrate obtained in the step 2) into the developing solvent and performing shaking development when the temperature ofthe developing solvent reaches a fitting temperature and is stably remained at the temperature, and then performing fixing, and allowing a figured formed by the electron beam glue to be stabilized; 4) performing inclined evaporation coating twice; 5) performing metal peeling. The preparation method of the superconductive Josephson junction employs an electron beam exposure mark technology and anelectron beam coating and metal peeling technologies, is relatively simple in process, avoids a complex suspension colloid preparation process and can perform batch preparation of superconductive Josephson junction samples in one day.
Owner:ORIGIN QUANTUM COMPUTING TECH (HEFEI) CO LTD

Josephson junction, superconducting device and preparation method

The invention provides a Josephson junction, a superconducting device and a preparation method. The Josephson junction is prepared by the steps of forming a first superconducting material layer, a barrier material layer and a second superconducting material layer on a substrate; etching the second superconducting material layer to form an upper electrode; depositing an insulating material on the barrier material layer, etching the insulating material, and etching the barrier layer; and finally, etching the first superconducting material layer to obtain the lower electrode. According to the invention, before the barrier layer is etched, a layer of insulating material is deposited firstly, the insulating material is etched firstly based on the same mask layer without removing photoresist, and then the barrier layer is etched, so that the barrier layer is well protected, and the barrier layer is prevented from reacting with a developing solution to generate a black reactant. The firstly deposited insulating layer can improve the insulating effect of the subsequently deposited insulating layer, reduce leakage current and achieve homogeneous growth, an obvious interface does not exist between the firstly deposited insulating layer and the subsequently deposited insulating layer, the subsequent process is not affected, the performance and stability of the superconducting circuit can be improved, and the working range of the whole superconducting circuit can be widened.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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