The present invention discloses a preparation method of a superconductive Josephson junction. belonging to the field of superconducting circuit elements. The method comprises the steps of: 1) performing preprocessing of a substrate, and obtaining a clean substrate; 2) performing
electron beam
exposure:
coating electron beam glue on the substrate, and employing an
electron beam
exposure device to
expose an area A and a area B on the substrate, wherein an area C is arranged at the intersection of the area A and the area B; 3) performing development: putting a container holding developing solventinto liquid, monitoring a temperature of the developing
solvent, immersing the substrate obtained in the step 2) into the developing
solvent and performing shaking development when the temperature ofthe developing
solvent reaches a fitting temperature and is stably remained at the temperature, and then performing fixing, and allowing a figured formed by the electron beam glue to be stabilized; 4) performing inclined
evaporation coating twice; 5) performing
metal peeling. The preparation method of the superconductive Josephson junction employs an electron beam
exposure mark technology and anelectron beam
coating and
metal peeling technologies, is relatively simple in process, avoids a complex suspension
colloid preparation process and can perform batch preparation of superconductive Josephson junction samples in one day.