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Bulk acoustic wave resonator, manufacturing method thereof, filter and radio frequency communication system

The technology of a bulk acoustic wave resonator and its manufacturing method, which is applied in the field of radio frequency communication, can solve the problems that the high-performance radio frequency system cannot be satisfied, and the quality factor cannot be further improved, so as to achieve the effect of improving sound wave loss, reducing loss, and reducing loss

Pending Publication Date: 2020-10-16
NINGBO SEMICON INT CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007]However, the quality factor (Q) of the cavity-type bulk acoustic wave resonator produced at present cannot be further improved, so it cannot meet the needs of high-performance radio frequency systems

Method used

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  • Bulk acoustic wave resonator, manufacturing method thereof, filter and radio frequency communication system
  • Bulk acoustic wave resonator, manufacturing method thereof, filter and radio frequency communication system
  • Bulk acoustic wave resonator, manufacturing method thereof, filter and radio frequency communication system

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Embodiment Construction

[0041] The technical solutions of the present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments. The advantages and features of the present invention will become clearer from the following description. It should be noted that all the drawings are in a very simplified form and use imprecise scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention. Similarly, if a method described herein includes a series of steps, the order in which these steps are presented is not necessarily the only order in which these steps can be performed, and some described steps may be omitted and / or some not described herein Additional steps can be added to the method. In addition, "staggering" between something and something in this article means that the two do not overlap in the cavity area, that is, the projections of the two on the bottom surface of the ...

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Abstract

The invention provides a bulk acoustic wave resonator, a manufacturing method thereof, a filter and a radio frequency communication system. A top electrode concave part formed on the periphery of a piezoelectric resonance layer and suspended above a cavity can prevent transverse waves generated by the piezoelectric resonance layer from being transmitted to the periphery of the cavity and reflect the transverse waves back to an effective working area, so that the sound wave loss is reduced, the quality factor of the resonator is improved, and finally, the performance of a device can be improved. Furthermore, the overlapping parts of a bottom electrode overlapping part and the cavity and the overlapping parts of a top electrode overlapping part and the cavity are suspended, and the bottom electrode overlapping part and the top electrode overlapping part are mutually staggered, so that a parasitic parameter can be greatly reduced, the problems of electric leakage, short circuit and the like can be avoided, and the reliability of the device can be improved.

Description

technical field [0001] The invention relates to the technical field of radio frequency communication, in particular to a bulk acoustic wave resonator, a manufacturing method thereof, a filter, and a radio frequency communication system. Background technique [0002] Radio frequency (RF) communications, such as those used in mobile phones, require the use of RF filters, each of which passes the desired frequency and restricts all other frequencies. With the development of mobile communication technology, the amount of mobile data transmission is also increasing rapidly. Therefore, under the premise of limited frequency resources and the use of as few mobile communication devices as possible, improving the transmission power of wireless power transmission equipment such as wireless base stations, micro base stations or repeaters has become a problem that must be considered, and it also means that the The requirements for filter power in the front-end circuit of mobile communi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/15H03H9/17H03H9/46H03H9/54
CPCH03H9/15H03H9/174H03H9/46H03H9/462H03H9/547H03H2009/155H03H9/17H03H9/54
Inventor 罗海龙
Owner NINGBO SEMICON INT CORP
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