Bulk acoustic wave resonator, manufacturing method thereof, filter, radio frequency communication system

A technology of a bulk acoustic wave resonator and a manufacturing method, which are applied in the field of radio frequency communication, can solve the problems of inability to meet high-performance radio frequency systems, and the quality factor cannot be further improved, and achieve the effects of improving acoustic wave loss, reducing parasitic parameters, and improving performance.
CN111786652BActive Publication Date: 2022-05-10NINGBO SEMICON INT CORP
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
NINGBO SEMICON INT CORP
Publication Date
2022-05-10

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Abstract

The present invention provides a bulk acoustic wave resonator, a manufacturing method thereof, a filter, and a radio frequency communication system. The raised portion of the bottom electrode and the raised portion of the top electrode formed on the periphery of the piezoelectric resonant layer and suspended above the cavity can block The shear wave generated by the piezoelectric resonant layer is transmitted to the periphery of the cavity, and the shear wave is reflected back to the effective working area, thereby reducing and reducing the acoustic wave loss, improving the quality factor of the resonator, and finally improving the performance of the device. Furthermore, the overlapping parts of the bottom electrode lap and the top electrode lap and the cavity are all suspended, and the bottom electrode lap and the top electrode lap are staggered from each other, which can greatly reduce parasitic parameters and avoid leakage, Short circuit and other problems can improve device reliability.
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Description

technical field

[0001] The present invention relates to the technical field of radio frequency communication, in particular to a bulk acoustic wave resonator, a method for manufacturing the same, a filter, and a radio frequency communication system. Background technique

[0002] Radio frequency (RF) communications, such as those used in mobile phones, require the use of radio frequency filters, each of which passes the desired frequency and restricts all others. With the development of mobile communication technology, the amount of mobile data transmission is also rising rapidly. Therefore, under the premise of limited frequency resources and the use of as few mobile communication devices as possible, improving the transmission power of wireless power transmitting devices such as wireless base stations, micro base stations or repeaters has become a problem that must be considered. The requirements for filter power in the front-end circuits of mobile communication equipment ...

Claims

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