Concave annular piezoelectric resonance gyroscope and production method thereof

Abstract

The invention provides a concave annular piezoelectric resonance gyroscope and a production method of the concave annular piezoelectric resonance gyroscope. The concave annular piezoelectric resonance gyroscope comprises a substrate, a hollow annular cavity which is arranged on the periphery of a central position of the substrate, a concave annular piezoelectric resonator which is arranged on the substrate, a supporting column which is fixed on the substrate and used for supporting the concave annular resonator, an electrode on the supporting column and eight electrodes which are symmetrically distributed on the outer surface of the concave annular resonator, wherein the concave annular piezoelectric resonator is located to be separated from the upper surface of the substrate so as to allow the vibration of the piezoelectric resonance gyroscope. The resonator is supported by the supporting column which is formed on the upper surface of the substrate, so that the stability is good, the influence of the supporting damping can be reduced, and the value Q and sensitivity of the gyroscope can be improved; the process is relatively simple and easy to realize; besides the central supporting, the resonator is separated from the substrate, so that the vibration is facilitated; by adopting the piezoelectric material, the overload resistance and impact resistance are high, the working resonance frequency is high, and the starting time is short.

Description

technical field [0001] The invention relates to a micro-electro-mechanical inertial sensor gyroscope in the technical field of micro-electro-mechanical (MEMS) systems, in particular to a concave annular piezoelectric resonance gyroscope and a manufacturing method thereof. Background technique [0002] As a carrier angular velocity sensitive inertial sensor, gyroscope plays a very important role in attitude control, navigation and positioning in traditional industrial fields such as aviation, aerospace, and shipbuilding. MEMS micro-gyroscopes have the advantages of small size and mass, low power consumption, low cost, good environmental adaptability, and high integration. [0003] With the development of my country's economy, the demand for MEMS micro-gyroscopes with high performance, small size and high reliability in the fields of military, industry and consumer electronics is becoming increasingly urgent. [0004] The piezoelectric gyroscope uses piezoelectric materials a...

AI Technical Summary

Problems solved by technology

[0006] This technology has the following disadvantages: the volume of the solid wave gyro cup-shaped resonator is too large, which limits its application in many conditions where the volume must be small; the piezoelectric electrodes of the cup-shaped vibrator chassis are bonded to the cup-shaped vibrator. There is a possibility of falling off under high-frequency vibration, and the reliability is not high; the processing technology of the gyroscope is relatively complicated, the processing cost is high, and it is not suitable for mass production; Large, the quality factor is difficult to improve; the gyro fixing method is unstable, and it is difficult to adapt to occasions that require high reliability

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