Integrated structure of crystal resonator and control circuit and integration method thereof

A crystal resonator and control circuit technology, applied in the direction of electrical components, impedance networks, etc., can solve the problems of large size and difficult integration

Active Publication Date: 2020-07-07
NINGBO SEMICON INT CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The purpose of the present invention is to provide an integration method of a crystal resonator and a control circuit, so as to solve the problem that the existing crystal resonator has a large size and is not easy to integrate

Method used

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  • Integrated structure of crystal resonator and control circuit and integration method thereof
  • Integrated structure of crystal resonator and control circuit and integration method thereof
  • Integrated structure of crystal resonator and control circuit and integration method thereof

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Embodiment 2

[0122] The difference from the first embodiment is that in this embodiment, the upper electrode 530 , the piezoelectric wafer 520 and the lower electrode 510 of the piezoelectric resonant sheet 500 are all formed on the front surface of the device wafer 100 , and the The piezoelectric resonator sheet 500 covers the opening of the lower cavity 120, and the formed crystal resonator is electrically connected to the control circuit in the device wafer 100, and then a bonding process is performed, so that the upper cavity 310 corresponds to the above-mentioned The side of the piezoelectric resonator plate 500 facing away from the lower cavity 120 forms a crystal resonator, thereby realizing the integrated setting of the crystal resonator and the control circuit.

[0123] In this embodiment, for providing a device wafer with a control circuit and a method for forming a lower cavity in the device wafer, reference may be made to Embodiment 1, and details are not described here.

[012...

Embodiment 1

[0141] In the first embodiment and the second embodiment, the piezoelectric resonant sheet including the upper electrode, the piezoelectric wafer and the lower electrode are all formed on the substrate or the device wafer. The difference from the above embodiment is that in this embodiment, the upper electrode and the piezoelectric wafer are formed on the substrate, and the lower electrode is formed on the device wafer.

[0142] Figure 3a ~ Figure 3d This is a schematic structural diagram of the method for integrating a crystal resonator and a control circuit in the third embodiment of the present invention in the manufacturing process. The following describes the steps of forming a crystal resonator in this embodiment in detail with reference to the accompanying drawings.

[0143] First refer to Figure 3a As shown, a device wafer 100 is provided, the device wafer 100 has a control circuit formed therein, and a lower electrode 510 is formed on the front side of the device w...

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Abstract

The invention provides an integrated structure of a crystal resonator and a control circuit, and an integration method thereof. A lower cavity is formed in a device wafer on which a control circuit isformed, an upper cavity is formed in a substrate, and the device wafer and the substrate are bonded by using a bonding process, so that a piezoelectric resonance piece is clamped between the device wafer and the substrate, and the integrated arrangement of a crystal resonator and the control circuit is realized. Moreover, the semiconductor chip can be further bonded to the back surface of the same device wafer, so that the integration level of the crystal resonator is further improved, and parameters of the on-chip modulation crystal resonator are realized. Compared with a traditional crystalresonator, the crystal resonator has the advantages that the size is smaller, the power consumption of the crystal resonator can be reduced, the crystal resonator can be integrated with other semiconductor components more easily, and therefore the integration degree of the device can be improved.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to an integrated structure of a crystal resonator and a control circuit and an integrated method thereof. Background technique [0002] Crystal resonators are resonant devices made using the inverse piezoelectric effect of piezoelectric crystals. They are key components of crystal oscillators and filters. They are widely used in high-frequency electronic signals to achieve accurate timing, frequency standards, and filtering. An essential frequency control function in signal processing systems. [0003] With the continuous development of semiconductor technology and the popularization of integrated circuits, the size of various components tends to be miniaturized. However, the current crystal resonator is not only difficult to integrate with other semiconductor components, but also the size of the crystal resonator is large. [0004] For example, currently common crystal res...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/205H03H3/02
CPCH03H9/205H03H3/02H03H9/0557H03H9/105H03H9/13H03H2003/021H03H9/0538
Inventor 秦晓珊
Owner NINGBO SEMICON INT CORP
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