Integrated structure of crystal resonator and control circuit and integration method thereof

A technology of crystal resonators and control circuits, which is applied in circuits, electric solid-state devices, semiconductor devices, etc., and can solve problems such as large size and difficult integration

Inactive Publication Date: 2020-07-07
NINGBO SEMICON INT CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The purpose of the present invention is to provide an integration method of a crystal resonator and a control circuit, so as to solve the problem that the existing crystal resonator has a large size and is not easy to integrate

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  • Integrated structure of crystal resonator and control circuit and integration method thereof
  • Integrated structure of crystal resonator and control circuit and integration method thereof
  • Integrated structure of crystal resonator and control circuit and integration method thereof

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Embodiment Construction

[0055] The core idea of ​​the present invention is to provide an integrated structure and an integrated method of a crystal resonator and a control circuit, in which a piezoelectric resonant plate is integrated on a substrate formed with a control circuit through a semiconductor planar process. On the one hand, the device size of the formed crystal resonator can be further reduced; on the other hand, the crystal resonator can be integrated with other semiconductor components to improve the integration degree of the device.

[0056] The integrated structure and integrated method of the crystal resonator and control circuit proposed by the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. The advantages and features of the present invention will become clearer from the following description. It should be noted that all the drawings are in a very simplified form and use imprecise scales, and are onl...

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Abstract

The invention provides an integrated structure of a crystal resonator and a control circuit, and an integration method thereof. A piezoelectric resonance sheet and a semiconductor chip are formed on the back surface of a device wafer, so that the semiconductor chip, a control circuit and a crystal resonator are arranged on the same device wafer. Thus, the integration degree of the crystal resonator can be improved, and parameters of the crystal resonator can be modulated on chip; compared with a traditional crystal resonator, the crystal resonator has the advantages that the size is smaller, and the power consumption of the crystal resonator can be reduced.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to an integrated structure of a crystal resonator and a control circuit and an integrated method thereof. Background technique [0002] Crystal resonators are resonant devices made using the inverse piezoelectric effect of piezoelectric crystals. They are key components of crystal oscillators and filters. They are widely used in high-frequency electronic signals to achieve accurate timing, frequency standards, and filtering. An essential frequency control function in signal processing systems. [0003] With the continuous development of semiconductor technology and the popularization of integrated circuits, the size of various components tends to be miniaturized. However, the current crystal resonator is not only difficult to integrate with other semiconductor components, but also the size of the crystal resonator is large. [0004] For example, currently common crystal res...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/205H03H3/02
CPCH03H9/205H03H3/02H03H9/1014H03H9/0557H03H9/0561H03H9/1042H03H9/19H10N39/00
Inventor 秦晓珊
Owner NINGBO SEMICON INT CORP
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