Telecentric laser field lens and laser scanning system thereof

Abstract

The invention discloses a telecentric laser field lens and a laser scanning system thereof, the telecentric laser field lens comprises a first lens, a second lens, a third lens, a fourth lens, a fifthlens and a sixth lens which are sequentially arranged along the laser propagation direction, wherein the first lens is a biconcave spherical negative lens, the second lens is a concave-convex spherical negative lens, the third lens is a concave-convex spherical positive lens, the fourth lens is a plano-convex spherical positive lens, the fifth lens is a biconvex spherical positive lens, and the sixth lens is a biplanar lens, so that a good flat field effect can be achieved, and laser processing can be carried out stably and efficiently.

Description

technical field [0001] The invention relates to the field of optical equipment, in particular to a telecentric laser field lens and a laser scanning system thereof. Background technique [0002] In the process of modern industrial manufacturing, laser processing is widely used in welding, surface treatment, drilling, marking and other processing technologies due to its advantages of high precision and high efficiency; laser processing is mainly composed of four parts, namely Laser, power supply, optical system and mechanical system; the optical system generally includes X / Y galvanometer and scanning field lens; the scanning field lens is generally installed at the end of the laser system to form a focal plane, and by controlling the X / Y galvanometer Reflection angle, so that the laser beam is focused on different areas of the focal plane, so as to achieve marking, welding, laser cleaning, 3D printing and other processes; scanning field mirrors are generally divided into: fla...

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Problems solved by technology

[0002] In the process of modern industrial manufacturing, laser processing is widely used in welding, surface treatment, drilling, marking and other processing techniques due to its advantages of high precision and high efficiency; laser processing is mainly composed of four parts, namely Lasers, power supplies, optical systems and mechanical systems; and optical systems generally include X / Y galvanometers and scanning field mirrors; scanning field mirrors are generally installed at the end of the laser system to form a focal plane, by controlling the X / Y galvanometer Reflection angle, so that the laser beam can be focused on different areas of the focal plane, so as to realize various processes such as marking, welding, laser cleaning, 3D printing, etc.; scanning field mirrors are generally divided into: flat field mirrors and telecentric field mirrors; and currently The telecentric scanning field mirrors in the industry often have the disadvantage of poor flat field effect, which affects the stable and efficient operation of laser processing

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