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Cooling device of evaporation source and evaporation source

A cooling device and evaporation source technology, applied in vacuum evaporation plating, ion implantation plating, metal material coating technology, etc., can solve the problems of increasing costs, improve functionality, avoid mutual doping, and improve product quality Effect

Pending Publication Date: 2021-07-16
SHANGHAI SHINSEE OPTOELECTRONICS TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Although the evaporation source of the existing evaporation device can be used for the manufacture of organic electroluminescent devices, in order to meet the requirements of high-resolution display and large-scale design of organic electroluminescent devices (OLEDs), it is necessary to simultaneously process a variety of organic electroluminescent devices. The material is evaporated to improve the efficiency of the coating process applied to large-area glass. However, the cooling part of the existing evaporation source is integrated with the cooling box. When the cooling part is damaged, the entire cooling device needs to be replaced, which increases the cost.

Method used

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  • Cooling device of evaporation source and evaporation source
  • Cooling device of evaporation source and evaporation source
  • Cooling device of evaporation source and evaporation source

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Embodiment Construction

[0063] The technical solution of the present invention is clearly and completely described below through specific embodiments in conjunction with the accompanying drawings. Obviously, the described embodiments are some embodiments of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0064] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "inner", "outer" and the like are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description. It is not intended to indicate or imply that the referred device or element must have a particular orientation, be constructed in a particul...

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Abstract

The invention relates to the technical field of display equipment, in particular to a cooling device of an evaporation source and the evaporation source. The cooling device of the evaporation source comprises a cooling box and cooling assemblies, wherein the cooling box is provided with a plurality of independent cooling grooves, and the cooling grooves are used for assembling crucibles; the cooling assemblies are detachably connected to the inner side walls of the cooling box correspondingly. According to the cooling device of the evaporation source and the evaporation source, the cooling device and cooling parts of the evaporation source can be detached independently and then can be replaced conveniently.

Description

technical field [0001] The invention relates to the technical field of display equipment, in particular to a cooling device for an evaporation source and an evaporation source. Background technique [0002] OLED (Organic Light-Emitting Diode, organic electroluminescent device) display technology is becoming more and more perfect, and its marketization and popularization has become a trend. Each film layer that constitutes an organic electroluminescent device is generally formed by vacuum evaporation coating. The basic principle of vacuum evaporation coating is to place the coating material in the evaporation source of the evaporation device for heating and evaporation, and the gas molecules or atoms of the formed coating material are deposited on the A film layer is formed on the substrate to be coated. [0003] Although the evaporation source of the existing evaporation device can be used for the manufacture of organic electroluminescent devices, in order to meet the requi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24
CPCC23C14/24
Inventor 轩景泉林文晶马晓宇钱海涛赵军王辉
Owner SHANGHAI SHINSEE OPTOELECTRONICS TECH CO LTD
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