Heating resistor, method for reducing current concentrated phenomenon and method for producing printing head
A technology for heating resistors and resistors, which is applied in printing and other directions, can solve the problems of local temperature rise of current density, shortening the life of electronic circuits, and increasing current density, so as to improve failure, reduce current intensive phenomenon, and resistance value increased effect
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[0030] There are three main ways to increase the resistance of heating resistors used in thermal inkjet printers. The first method is to deposit a thinner resistive layer on the substrate oxide layer. The disadvantage of this method is that the surface of the film becomes easily damaged as its thickness decreases, and the thinner the film, the more difficult it is to control its thickness. The second approach is to use a different material with a higher intrinsic resistivity than the known tantalum-aluminum film. Due to the extreme environmental conditions that heating resistors are subjected to, coupled with the need for low-cost, low-defect thin-film processes, this approach is unlikely to be adopted in the short term. A third approach is to geometrically reconfigure the thin film resistor, which increases the resistance of the heating resistor. The present invention proposes according to the third method.
[0031] Figure 1A The perspective view of FIG. 2 shows one examp...
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