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Thin film actuated mirror array in optical projection system and method for mfg. same

A technology of optical projection and manufacturing method, applied in the direction of optics, optical components, image reproducer using projection device, etc., can solve the problems of limitation, reduction of light efficiency, narrow distance between light source and screen, etc.

Inactive Publication Date: 2005-02-23
DAEWOO ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0015] However, in the above-mentioned thin film AMA, since the actuator having one active layer is deformed so as to reflect the incident light from the light source with a mirror mounted on the actuator, the actuator provided therein is limited.
Thus, the light efficiency of the light reflected by the mirror is reduced, and the contrast of the image projected on the screen is also reduced
In addition, the distance between the light source and the screen is narrower due to the limited inclination angle of the actuator

Method used

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  • Thin film actuated mirror array in optical projection system and method for mfg. same
  • Thin film actuated mirror array in optical projection system and method for mfg. same
  • Thin film actuated mirror array in optical projection system and method for mfg. same

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0063] Figure 4 It is a plan view showing a thin-film AMA in an optical projection system according to the first embodiment of the present invention; Figure 5 for along Figure 4 A cross-sectional view taken along line A1-A2 in ; Image 6 for along Figure 4 A cross-sectional view taken along line B1-B2 in .

[0064] see Figure 4 , the thin-film AMA in an optical projection system according to this embodiment has a substrate 100, an actuator 170 formed on the substrate 100, and a reflector 180 mounted on the actuator 170 .

[0065]The actuator 170 has a first actuating portion 171 formed on a first portion of the substrate 100 and a second actuating portion 172 formed on a second portion of the substrate 100 . The second actuating part 172 is integral with the first actuating part 171 . The actuator 170 having the first actuating portion 171 and the second actuating portion 172 is U-shaped.

[0066] The reflector 180 is supported by a post 175 (post) formed on the f...

Embodiment 2

[0092] Figure 11 is a plan view showing a thin-film AMA in an optical projection system according to a second embodiment of the present invention. Figure 12 for along Figure 11 A cross-sectional view taken along line C1-C2 in . Figure 13 for along Figure 11 A cross-sectional view taken along line D1-D2 in . Figure 14 for along Figure 11 A cross-sectional view taken along line E1-E2 in .

[0093] see Figure 11 , the thin-film AMA in an optical projection system according to this embodiment has a substrate 200, an actuator 270 formed on the substrate 200, and a reflector 280 mounted on the actuator 270 .

[0094] The actuator 270 has a first actuating part 271 formed on the first part of the substrate 200; a second actuating part 272 formed on the second part of the substrate 200; Between the first actuating portion 271 and the second actuating portion 272 is a third actuating portion 273 integrally formed with the first actuating portion 271 and the second actua...

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Abstract

Thin film AMA in an optical projection system and a method for manufacturing the same are disclosed. The thin film AMA has a substrate having an electrical wiring and a connecting terminal, an actuator formed on the substrate, and a reflecting member formed on the actuator. The actuator has a plurality of actuating portions in which adjacent actuating portions tilt in opposite directions one after another. Each actuating portion has bottom electrodes, active layers, top electrodes, and via contacts. The top electrodes and bottom electrodes of the actuating portions are cross-connected, so electric fields are generated in opposite directions. The reflecting member installed on the actuator has a large tilting angle. Therefore, the light efficiency of the light reflected by the reflecting member increases and the contrast of the picture projected onto a screen also increases.

Description

technical field [0001] The present invention relates to a thin film actuated mirror array in a light projection system and a method of manufacturing the same, more particularly, to a thin film actuated mirror array in a light projection system having a reflective member and an actuating The actuator has a plurality of actuating parts, wherein adjacent actuating parts are actuated one by one in opposite directions, so that the reflector provided on the actuator has a large inclination angle. Background technique [0002] Generally, from an optical point of view, light modulators can be classified into two types. One type is a direct light modulator, such as a cathode ray tube (CRT, cathode ray tube), and the other type is a transmission light modulator, such as a liquid crystal display (LCD, liquid crystal display). The CRT produces high-quality images on the screen, but, depending on the magnification ratio of the screen, the weight, volume, and manufacturing cost of the CR...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B26/08H04N9/31
Inventor 南润宇
Owner DAEWOO ELECTRONICS CO LTD