Integrated miniature spectrometer
A micro-spectrometer and spectrum technology, which is applied in the field of analytical instruments, can solve the problems that have not yet been reported on micro-spectrometers, inconvenient low-light detection, poor repeatability, etc.
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[0009] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings.
[0010] The working principle of the integrated micro-spectrometer provided by the present invention is: after the light to be measured enters the micro-spectrometer through the incident optical fiber (2), it passes through the concave grating (1) for spectral imaging, and then the spectral image is transformed by the plane mirror (3). The surface is projected onto the photoelectric detection array (5), and the measured spectral signal is converted into a corresponding spectral electrical signal by the photoelectric detection array (5), and the spectral electrical signal is read out by the signal reading circuit, and then converted by A / D Spectral signal processing circuit and analysis software complete the acquisition, processing and analysis of spectral signals.
[0011] The present invention fundamentally solves key technologies such as mini...
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