Methods for manufacturing thin film transistor array substrate and display panel
a technology of array substrate and thin film transistor, which is applied in the manufacturing of semiconductor/solid-state devices, semiconductor devices, electrical equipment, etc., can solve the problems of high cost of masks, long process time, and more complicated processes, so as to reduce the amount of masks, reduce the cost and time of fabrication process, and reduce the use of wet etching
Active Publication Date: 2013-01-31
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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Benefits of technology
The present invention is about a method for manufacturing a TFT array substrate and a display panel. The method makes use of a special exposure process that results in higher transmittance in certain regions of the substrate. This allows for the use of fewer masks and reduces the cost and time of fabrication. Additionally, the method reduces the use of wet etching which helps to protect the elements of the substrate. The technical effects of the invention include higher efficiency and reduced costs.
Problems solved by technology
However, the masks are very expensive.
The more the number of the masks is, the higher the cost for fabricating the TFT is.
Furthermore, more masks will result in longer process time and more complicated process.
Besides, in the photolithography process, several steps of wet etching are required, hence deteriorating metal lines of the TFT array substrate
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[0020]The following embodiments are referring to the accompanying drawings for exemplifying specific performable embodiments of the present invention. Furthermore, directional terms described by the present invention, such as upper, lower, front, back, left, right, inner, outer, side and etc., are only directions by referring to the accompanying drawings, and thus the used directional terms are used to describe and understand the present invention, but the present invention is not limited thereto.
[0021]In the drawings, structure-like elements are labeled with like reference numerals.
[0022]Referring to FIG. 1, a cross-sectional view showing a display panel and a backlight module according to an embodiment of the present invention is illustrated. The method of the present embodiment for manufacturing a TFT array substrate can be applicable to the fabrication of the display panel 100, such as a liquid crystal display panel. When utilizing the display panel 100 of the present embodiment...
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The present invention provides methods for manufacturing a thin film transistor (TFT) array substrate and a display panel. The method for manufacturing the TFT array substrate comprises the following steps: forming a plurality of gate electrodes, a gate insulating layer, a semiconductor layer, an ohmic contact layer, an electrode layer and a photo-resist layer on a transparent substrate in sequence; using a multi tone mask to pattern the photo-resist layer; forming a plurality of source electrodes and a plurality of drain electrodes at both sides of the channels, respectively; heating the photo-resist layer; etching the semiconductor layer; removing the photo-resist layer; forming a passivation layer on the channels, the source electrodes and the drain electrodes; and forming a pixel electrode layer on the passivation layer. The present invention can reduce an amount of the required masks in the fabrication process, and only one wet etching is required to etch the metal material on the TFT array substrate.
Description
FIELD OF THE INVENTION[0001]The present invention relates to a field of a liquid crystal display technology, and more particularly to methods for manufacturing a thin film transistor (TFT) array substrate and a display panel.BACKGROUND OF THE INVENTION[0002]Liquid crystal displays (LCDs) have been widely applied in electrical products. Currently, most of LCDs are backlight type LCDs which comprise a liquid crystal panel and a backlight module. In general, the LCD panel may include a color filter (CF) substrate and a TFT array substrate. The CF substrate includes a plurality of color filters and a common electrode. The TFT array substrate includes a plurality of parallel scanning lines, a plurality of parallel data lines, a plurality of TFTs and a plurality of pixel electrodes. The scanning lines are respectively vertical to the data lines. Each adjacent two of the scanning lines and each adjacent two of the data lines intersect to define a pixel area.[0003]In a process for fabricati...
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IPC IPC(8): H01L33/08H01L21/336
CPCH01L27/1288H01L21/32139H01L21/0274H01L21/0273
Inventor HSU, JEHAOXUE, JINGFENGYAO, XIAOHUI
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD