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Vacuum device

a vacuum device and vacuum technology, applied in the direction of positive displacement liquid engine, pump control, electric discharge tube, etc., can solve the problems of increasing the energy requirement of operation, increasing the noise of additional fore-pumps, and mainly not being able to directly pump away into the atmosphere, so as to minimize the noise and minimize the power uptake

Inactive Publication Date: 2014-01-30
ELLCIE INDS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The objective of this invention is to create a vacuum device that requires minimal energy and noise levels for use with an electron microscope. The device allows the pumping process to take place with minimal interruption.

Problems solved by technology

However, turbo-pumps are mostly not capable of pumping away directly into the atmosphere.
It is annoying that the additional fore-pumps produce additional noise and have an additional energy requirement during operation.

Method used

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  • Vacuum device
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Embodiment Construction

[0027]FIG. 1 shows a vacuum device 2 according to an embodiment of the invention, in combination with an electron microscope 4. The electron microscope 4, in a known manner, comprises a turbo-pump as well as a control device for the control of the turbo-pump inside microscope. The electron microscope 4 comprises a suction connection 6, via which the residual gas can be conveyed away, in a known manner, via an external fore-pump connected downstream of the turbo-pump.

[0028]According to the invention, now instead of such a fore-pump, the vacuum device 2 according to the invention is connected to the electron microscope 4. The vacuum device 2, as a central integral part or constituent, comprises a vacuum container 8 as well as a pump or vacuum pump 10. The vacuum pump 10 is connected to the vacuum container 8 via a conduit 12, which creates a flow path from the vacuum container 8 to the vacuum pump 10, so that the vacuum pump 10 is capable of evacuating the vacuum container 8.

[0029]A f...

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Abstract

A vacuum device is provided which forms an autarkic subassembly and includes a vacuum container, a vacuum pump connected to the vacuum container, a vacuum connection for connecting to an external installation, and a control device designed for control of the vacuum pump. The vacuum device serves as a suction device to produce a vacuum in and to suck or draw off gas from this connected installation. The vacuum device is designed as an autarkic (self-sufficient or self-contained) subassembly, which can be connected for example to an electron microscope.

Description

BACKGROUND OF THE INVENTION[0001]The invention relates to a vacuum device for producing a vacuum, in particular for use with an electron microscope.[0002]With electron microscopes, the sample chamber is evacuated for the examination. As a rule, a turbo-pump is provided for the evacuation, which is an integral part of the electron microscope and is integrated into it. However, turbo-pumps are mostly not capable of pumping away directly into the atmosphere. For this reason, it is known to arrange a fore-pump downstream of the turbo-pump and this fore-pump leads away the residual gas quantities. These fore-pumps are connected externally to the electron microscope. It is annoying that the additional fore-pumps produce additional noise and have an additional energy requirement during operation.BRIEF SUMMARY OF THE INVENTION[0003]With regard to these problems, it is an object of the invention to provide a vacuum device which permits the pumping procedure to takes its course with a minimiz...

Claims

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Application Information

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IPC IPC(8): F04B23/00
CPCF04B23/00H01J37/18H01J2237/1825
Inventor KLEIN, MARTINMARIENHOFF, PETER
Owner ELLCIE INDS