Miniaturized gas sensor device and method
a gas sensor and miniaturization technology, applied in measurement devices, instruments, scientific instruments, etc., can solve the problems of limiting the minimum size to which the sensor can be reduced, weight and power consumption, and difficulty in fabrication, so as to improve the sensor response
Active Publication Date: 2018-03-29
OHIO STATE INNOVATION FOUND
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AI Technical Summary
Benefits of technology
The solution achieves increased sensitivity and reduced power consumption, enabling detection of NOx at low concentrations and operation across a broad temperature range, including high temperatures, while reducing sensor size and cost through batch fabrication.
Problems solved by technology
These techniques vary and a continuing challenge is to design sensitive systems with limited size, weight and power consumption so as to allow for portable sensor systems.
This manual fabrication limits the minimum size to which the sensors can be reduced.
Fabrication is a challenge at these size scales for several reasons.
However, the overall surface area of a MEMS sensor unit may be notably smaller than corresponding macro sensor devices.
This may decrease the overall number of chemical reactions involved, resulting in a decreased signal.
Such optimization may be different on the macro level then for micro sensors, and simple application of design principle that are successful for macro sensor can lead to significantly degraded performance for micro sensors.
A reduction in size of the sensors using MEMS techniques would not only decrease the size for better implementation in a handheld home monitoring unit, but the reduced size would also decrease the power required to bring the sensors up to operating temperature.
Method used
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Examples—Shadow Mask Fabrication
[0055]The shadow mask version of the sensor arrays utilized a metal shadow mask during each of the deposition processes to define the deposited films into the desired features. The metal masks were placed onto the substrate and clamped at the edges of the substrate. The shadow masks are easy to use and are aligned from one mask layer to the next. However, the defined features are rather large in size, there can be distortion in the shadow mask resulting in edges of the defined shapes that are not sharp, and after multiple uses the resulting film build up on the shadow masks may cause warpage of the shadow mask and / or micromasking during the deposition process as particles fall off of the shadow mask and land on the openings defined by the mask.
[0056]For comparison, our initial sensor design is shown in FIG. 1 with corresponding dimensions, along with the second generation, shadow mass that is illustrated in FIG. 2. FIG. 1 shows that the electrolyte is...
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Abstract
Various embodiments of a gas sensor device and method of fabricating a gas sensor device are provided. In one embodiment a gas sensor device includes a base substrate, an electrolyte layer disposed on the base substrate and a plurality of potentiometric sensor units electrically coupled to the base substrate. Each potentiometric sensor unit includes an electrolyte layer disposed on the base substrate, a sensing electrode comprising tungsten oxide (WO3) and platinum (Pt), a reference electrode comprising Pt, and a plurality of connectors coupled to the plurality of potentiometric sensors to connect the plurality of potentiometric sensors in series.
Description
RELATED APPLICATION[0001]This patent application claims priority to Application Ser. No. 61 / 801,106 entitled “Miniaturized Gas Sensor and Method” filed on Mar. 15, 2013, the entirety of which is incorporated by reference herein.TECHNICAL FIELD[0002]The embodiments of the present invention relate generally to gas sensors. More specifically, the disclosure relates to miniaturized gas sensors that detect NOx gas.BACKGROUND OF THE INVENTION[0003]Nitric oxide (NO) sensing is a critical capability for a variety of applications ranging from high temperature combustion to clinical analysis. In high temperature combustion applications, detection of nitrogen oxides (NOx) is critical in controlling the processes used to reduce the NOx emissions produced by the leaner combustion processes being developed to improve fuel efficiency. NOx sensors that are high temperature capable may also find use in other high-temperature applications. Another area where NOx sensing is required is in the medical ...
Claims
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IPC IPC(8): G01N27/417G01N33/00
CPCG01N27/417G01N33/0037G01N33/0031Y02A50/20
InventorDUTTA, PRABIR K.MONDAL, SUVRA P.
OwnerOHIO STATE INNOVATION FOUND