The invention relates to a design method of a field
grinding type surface potential sensor, in particular to a design method of a field
grinding type surface potential sensor working in high-density space charges. The invention aims to solve the problem that the electrostatic control performance is influenced by deviation of the detected surface potential of a traditional field
grinding type surface potential sensor in a high-density
space charge environment. The method comprises the following steps: firstly, designing a differential probe structure with a reverse-phase rotor and a double-sided induction
electrode, and introducing reverse-phase current on the upper surface to realize self-compensation of interference; a
mathematical model of the differential sensor is established, and interference and compensation current components are quantified; on the basis, a closed-
loop control system model containing interference is established and analyzed, the stable condition of the
system is derived, a design formula for compensating the cavity distance is deduced according to the stable condition, and it is ensured that the
system works stably in the interference environment, and the surface potential is converged to zero. The invention belongs to the technical field of industrial electrostatic control.