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Method and system for high speed signal processing

a signal processing and high-speed technology, applied in the field of high-speed camera readout and real-time signal processing, can solve the problems of limited bandwidth between the camera and the image processor, which may become the bottleneck of high-speed signal processing, and achieve high-speed signal readout and processing, sacrificing data quality or precision, and limited bandwidth

Active Publication Date: 2022-03-31
FEI CO
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  • Application Information

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Benefits of technology

The patent describes a method for getting data from a camera that uses a pixelized image sensor to detect charged particles. The method involves reading the pixel voltage of the camera multiple times without resetting it, and then digitizing the voltage into a smaller number of bits. The method also removes at least one significant bit from the digitized voltage to make it faster to transfer the data to an image processor. This allows for faster readout and processing while maintaining data quality and precision. Overall, the method achieves high-speed signal readout and processing with limited bandwidth.

Problems solved by technology

However, Applicant recognizes that the limited bandwidth within the camera and / or between the camera and the image processor may become the bottleneck for high speed signal processing.

Method used

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  • Method and system for high speed signal processing
  • Method and system for high speed signal processing

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Embodiment Construction

[0015]The following description relates to systems and methods for data acquisition and data processing in a microscopy system, such as a charged particle microscope of FIG. 1. The charged particle microscope may include a source for generating charged particles. Responsive to irradiating a sample with the charged particles, various types of charged particles emitted from the sample are detected by different cameras or detectors.

[0016]The camera or detector may include a pixelated image sensor for converting charged particles impinging a pixel of the image sensor into the pixel voltage. The pixel voltage may be read out from the image sensor using the mfCDS method. In particular, the pixel voltage of a particular pixel is read out multiple times before resetting the pixel voltage to a reset value. The number of charged particles detected by the pixel may be determined based on the difference between sequential readouts of the pixel voltage. Using mfCDS, multiple frames can be readou...

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Abstract

A method and system for acquiring data from a pixelated image sensor for detecting charged particles. The method includes reading a pixel voltage of one or more of the multiple pixels multiple times without resetting the image sensor and digitizing the pixel into a first number of bits. The camera outputs a digitized compressed pixel voltage in a second, less, number of bits. The maximum range of the digitized compressed pixel voltage is less than a maximum range of the pixel voltage.

Description

INCORPORATION BY REFERENCE[0001]This application relates to U.S. application Ser. No. 13 / 645,725 filed on Oct. 5, 2012, titled “Method for acquiring data with an image sensor”, by Janssen et al., which is incorporated herein by reference in its entirety and for all purposes.FIELD OF THE INVENTION[0002]The present description relates generally to methods and systems for data acquisition using a camera, and more particularly, to high speed camera readout and real-time signal processing of the readout data.BACKGROUND OF THE INVENTION[0003]A charged particle microscopy system may include a camera for detecting charged particles emitted from a sample, digitizing the detected raw signal, and outputting the digitized signal to an image processor for real-time signal processing. In order to increase the data acquisition speed, the microscopy system requires a short sensor response time, high speed sensor data readout, and real-time data processing and data storage. For cameras with pixelate...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): H04N5/378H04N5/363H04N5/359
CPCH04N5/378H04N5/359H04N5/363H01J2237/2446H01J2237/2441H01J2237/24455H01J2237/24495H01J37/224H04N25/616H04N25/00H04N25/40H04N25/618H04N25/65H04N25/62H04N25/30H04N25/78H04N25/75
Inventor ROEVEN, HENRICUS GERARDUSBRAAN, ROBJANSSEN, BART JOZEFKEIZER, JEROEN
Owner FEI CO
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