Piezoelectrically controllable microfluid actor system
Active Publication Date: 2007-05-15
EPPENDORF SE
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- Description
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Benefits of technology
[0021]In all solutions, the diaphragm comprises two diaphragm layers of which at least one is electrically controllable, i.e. is mechanically active. This diaphragm layer is a piezoceramic element. It is preferred to control it electrically such as to make it contract in the diaphragm plane. Its contraction comes about because the piezoceramic element maintains its volume and, when acted on by an external, electrically equidirectional field, will be polarized in a direction normal to the diaphragm plane and, therefore, will be expanded. The piezoceramic element has fixedly connected thereto a further diaphragm layer which has dimensions similar to that of the piezoceramic element, but is not necessarily controllable electrically, or is passive. Preferably, the further diaphragm layer is also a piezoceramic element. This reduces the influence of temperature on the operation of the diaphragm. The contraction alone of the active diaphragm layer results in the entire diaphragm being bulged similarly to a bimetal which is deformed by a change in temperature.
[0073]The inventive microfluid actor system combines inexpensive and well-established technical equipment with a high quality of mechanical manufacture and a possibility of integrating microfluid systems, sensor equipment, membrane actors, and electronic systems on one carrier.
Problems solved by technology
The microvalves and micropumps currently available involve relatively great expenditure and, hence, are costly and not particularly suited for an economical use in a series product.
Moreover, in this arrangement, the glass plate allows to be deflected comparatively little from the silicon chip by controlling the piezoceramic element as compared to undergoing a deflection towards the silicon chip which, however, is impossible in this construction in a non-deflected condition.
The production of such microchips requires a large manufacturing expenditure as is common in the semiconductor technology because of a multiplicity of different production steps.
Method used
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Embodiment Construction
[0088]In the following description of various embodiments, like components having the same designation are given like reference numbers with constructional differences being marked by primes.
[0089]A normally open 2 / 2-way micro-diaphragm valve 1 of FIG. 1 has a substrate 2 which has a border-sided support area 3 projecting from one side which preferably is of an annular ring shape and to which a diaphragm 4, which preferably is circular, is fixed at 5, preferably by adhering, to the border thereof.
[0090]The diaphragm 4 comprises two piezoceramic elements 6, 7 which are adhered to each other on one surface. The piezoceramic element 6 facing away from the substrate 2 has dimensions smaller than those of the piezoceramic element 7 facing the substrate. The piezoceramic element 6 is electrically controllable via an electrically conductive contact surface 8 at the outside and an electrically conductive contact surface 9 at the upper side of the piezoceramic element 7. It is an active piez...
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A piezoelectrically controllable microfluid actor system, comprising a planar substrate which has at least one cavity on at least one side and has at least one passage which has an aperture in the cavity, and at least one diaphragm which has its border mounted on one side of the substrate so as to span the cavity, which has at least two superposed and interconnected diaphragm layers of which at least one is an electrically controllable piezoceramic element, and which is adapted to be deflected into the cavity by means of an electric drive.
Description
BACKGROUND OF THE INVENTION[0001]1. Field of the Invention[0002]The invention relates to a piezoelectrically controllable microfluid actor system.[0003]2. Description of the Prior Art[0004]EP 1 150 105 A2 has made known gas-cushioned microproportioning systems for proportioning liquid volumes in the microlitre and sub-microlitre ranges. Such systems have a liquid reservoir with a storage space for the liquid to be proportioned, the borderline of which is broken through by an outwardly leading liquid passage and a gas passage. They further have a gas displacement system with a micropump for pumping a gas, and a communication with the gas passage. In addition, they have a proportioning control in an active communication with the micro-pump to produce a negative pressure or positive pressure by actuating the micro-pump and applying the negative pressure or positive pressure to the liquid reservoir to receive a liquid in the storage space through the liquid passage or to deliver it ther...
Claims
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Login to View More IPC IPC(8): B01L3/02B01L3/00F04B43/04F15C5/00F16K31/00F16K99/00G05D7/06
CPCB01L3/0268F04B43/046F16K31/005F16K99/0001F16K99/0015F16K99/0048G05D7/0694B01L2400/0439B01L2400/0638F16K2099/0078F16K2099/008F16K2099/0094F04B43/14
InventorSANDER, DIETMAR
OwnerEPPENDORF SE