1results about How to "Avoid disturbing noise" patented technology

The application relates to the technical field of plasma detection, in particular to a double-channel ion energy probe based on a magnetic deflection effect. The application provides a double-channel ion energy probe based on a magnetic deflection effect, which comprises an upper permanent magnet plate, a lower permanent magnet plate, a double-channel collimator and a double-channel probe; the double-channel collimator penetrates into a shell; the double-channel collimator comprises a scanning channel and a reference channel; the scanning channel and the reference channel are connected with different values of voltage; the double-channel collimator is used for enabling ions to enter the shell along the channel direction; the upper permanent magnet plate and the lower permanent magnet plate are fixed at the upper and lower ends of the shell respectively so as to form a uniform magnetic field; the double-channel probe is arranged in the shell and comprises a scanning collection probe and a reference collection probe which are respectively coplanar with the scanning channel and the reference channel; and the scanning collection probe and the reference collection probe are respectively connected with different values of voltage. The scheme can provide an ion current probe with high signal-to-noise ratio.