Film pulling-up apparatus

Abstract

The present invention discloses a device for lifting and pulling a film, which comprises a hydraulic device, a lifting and pulling device, and a control device. A rotating shaft of a motor rotor is directly interconnected with a rotating shaft of a hydraulic pump. An inlet of the hydraulic pump is connected with an oil cleaner in an oil tank through a pipeline. An outlet of the hydraulic pump is connected with a valve base of an electromagnetic directional valve. A hydraulic pressure gauge is connected with the valve base of the electromagnetic directional valve. An overflow regulating valve is connected with a valve base of the electromagnetic directional valve. An overflow oil turn pipe is arranged on the bottom inside the oil tank by the valve base of the electromagnetic directional valve. The valve base of the electromagnetic directional valve is connected with an upper cavity of a lifting and pulling oil cylinder through a high pressure flexible oil delivery pipe. The valve base of the electromagnetic directional valve is connected with a speed adjusting loop connecting port which consists of a throttle governing valve and a speed regulating control electromagnetic valve. The other end of the speed adjusting loop is connected with a lower cavity interface of the lifting and pulling oil tank through the high pressure flexible oil delivery pipe. The hydraulic device is connected with the lifting and pulling device. The device is simple in structure, and realizes vibration-free and vertically stable lifting and pulling. The lifting and pulling process is uniform in speed and stable. The speed of lifting and pulling is adjustable. The thickness of the film is uniform.

Description

technical field [0001] The invention relates to a liquid phase epitaxy thin film forming equipment, more specifically to a thin film pulling device for forming thin films by vertical pulling in various solutions. It is suitable for the research of nano-materials, surface modification, and the application of nano-functional thin film materials in sensor devices, solar energy utilization and other research fields. Background technique [0002] In the field of nanotechnology research, especially in the research and application research of nano functional materials, at present, a lot of research work needs to use vertical pulling to obtain thin films from solution. In order to obtain high-quality nano-film materials, higher technical requirements are put forward for the pulling film-forming equipment. [0003] There are two types of lifting actuators for existing vertical lifting machines: one type adopts a "stroke screw" type lifting structure, which directly drives the rotati...

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