Phase shift interference microscopic device and method based on Zernike phase contrast imaging

A technology of phase contrast imaging and phase shift interference, which is applied in microscopes, measurement devices, optical devices, etc., can solve the problems of low lateral resolution, environmental vibration sensitivity, and high coherent noise, and achieve high lateral resolution and vibration resistance. Good, low coherent noise effect

Active Publication Date: 2011-10-19
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0007] The invention combines Zernike phase-contrast imaging and phase-shift technology, and proposes a phase-shift interference microscopy device with good vibration resistance, high lateral resolution, and low coherent noise. For measurement, the present invention solves the limitat

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  • Phase shift interference microscopic device and method based on Zernike phase contrast imaging
  • Phase shift interference microscopic device and method based on Zernike phase contrast imaging
  • Phase shift interference microscopic device and method based on Zernike phase contrast imaging

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Embodiment Construction

[0073] The parts structure and function included in the present invention are as follows:

[0074] 1. Laser 1, the wavelength is in the visible light range, the output laser power is stable, and it is used to generate illumination light.

[0075] 2. The light intensity controller 2 can be a continuously adjustable attenuator, or two polarizers placed in parallel (the second polarizer is used to fix the polarization direction of the illumination light, and the first polarizer can be rotated to adjust intensity of the light).

[0076] 3. The first lens 5, the second lens 7, the third lens 9, the fourth lens 13, the fifth lens 16, the sixth lens 17, the seventh lens 18, and the eighth lens 19 are required to be aplanatic lenses.

[0077] 4. The rotating scatterer 6, that is, the rotating scatterer, can be a frosted glass sheet driven by a motor and the center is fixed on the motor shaft. By rotating, each point on the lighting ring is irrelevant. It is required to have good rot...

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Abstract

The invention relates to a phase shift interference microscopic device and method based on Zernike phase contrast imaging. The device comprises an illuminating unit, a microscopic amplifying unit and a phase contrast imaging unit which are arranged in sequence along the incident direction of light; the illuminating unit comprises a beam expanding system, a multi-beam illumination generating unit and a beam contraction collimating unit which are arranged in sequence along the light path direction; the beam expanding system comprises a laser, a light intensity controller and a beam expanding unit which are arranged in sequence along the light path direction; the multi-beam illumination generating unit comprises an axicon lens, a first lens, a rotary scatterer, a second lens and an amplitude mask plate which are arranged in sequence along a light path; a tested sample is arranged on a focal surface between a first objective lens and a second objective lens; and the tested sample and a CCD (Charge Coupled Device) camera meet an objective image relation. Due to the adoption of the device and the method, the vignetting effect of the conventional Zernike phase contrast imaging is avoided, quantitative measurement of a phase object is realized, and the light path has the advantages of low coherent noise, high vibration resistance, high transverse resolution and the like.

Description

technical field [0001] The invention relates to a microscopic device for measuring the amplitude and phase distribution of tiny objects. Background technique [0002] Ordinary microscopes can only observe the intensity distribution of tiny objects, but they can't do anything about the phase distribution of transparent objects. However, the phase distribution of the measured object is directly related to the three-dimensional shape of the measured object, and it is of great significance to accurately measure the phase distribution of tiny objects. [0003] The current optical interferometry techniques used to measure the phase distribution of tiny objects mainly include the following: [0004] 1. Optical interference microscopy technology, which combines optical interference method with microscope, provides a powerful means for accurately measuring the phase distribution of tiny objects. The existing interference microscope divides the laser beam into two beams in space. On...

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Application Information

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IPC IPC(8): G01B9/023G02B21/36G02B21/00G02B21/14
Inventor 郜鹏姚保利雷铭严绍辉但旦叶彤
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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