Random phase-shifting hybrid frequency type piezoelectric vibrator combination mega soundwave transducer device
A technology of piezoelectric vibrator and megasonic wave, which is applied in the field of random phase-shift mixed-frequency piezoelectric vibrator combined megasonic transducer device, which can solve the problems of low sound field intensity, reduced vibrator amplitude, and reduced cleaning effect, so as to improve accuracy , reducing the effect of frequency conversion time and phase noise
Active Publication Date: 2013-12-18
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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Problems solved by technology
However, due to the interference phenomenon of the megasonic sound field, many hot spots with high sound field intensity will be formed on the wafer, and many dead spots with low sound field intensity will be formed at the same time, and the uniformity of the sound field intensity on the wafer is difficult to achieve.
Although in the process of improvement, there is a method of using frequency scanning to reduce the formation of hot spots, but since the frequency scanning only surrounds one center frequency, and this scanning around the center frequency is only applied to one megasonic vibrator, the megasonic vibrator The natural frequency of the mechanical vibration is fixed (generally equal to the center frequency of the megasonic wave), and the change of the deviation from the center frequency will cause the amplitude of the vibrator to decrease and the energy of the transmitted megasonic wave to decrease, so that the acoustic energy density formed on the surface of the wafer increases with the scanning Frequency changes, unable to produce a uniform sound field
There is also a method of frequency superposition combination, but because the voltage of frequency superposition combination is still applied to the same piezoelectric crystal oscillator, the vibration of the oscillator changes too much, which affects the efficiency of electro-acoustic conversion, which reduces the cleaning effect
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[0032] The following is a detailed description of a random phase-shift mixing type piezoelectric vibrator combined megasonic transducer device proposed by the present invention with reference to the drawings and embodiments.
[0033] The present invention adopts two or more drive signals, the signal frequency is between 700KHz~2MHz, the phase offset of at least one drive signal can be set randomly within a certain range over time, and they are respectively loaded into a megasonic converter Energy device assembly. The driving signal with fixed phase shift and relatively random phase shift changes acting on the combination of different piezoelectric crystal elements, and the excited megasonic synthesis waveform produces a randomly changing sound field in the corrosion cleaning medium, which will not form the existing megasonic wave The fixed megasonic wave excited by the transducer synthesizes the hot spots and dead spots generated by the coherence of the sound field, thereby gener...
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The invention relates to the technical field of mega soundwave transducers, and discloses a random phase-shifting hybridfrequency type piezoelectric vibrator combination mega soundwave transducer device, wherein a microprocessor of an alternating current voltage drive signal generation and amplification circuit is used for outputting the frequency control words and the phase-shifting control words of multichannel alternating current voltage drive signal to a multichannel alternating current voltage drive signal generation circuit, and at least one path of phase-shifting control word randomly varies along with time within a certain range; the multichannel alternating current voltage drive signal generation circuit generates the multichannel alternating current voltage drive signal according to the frequency control words and the phase-shifting control words; a power amplification and impedance matching circuit is used for amplifying the generated alternating current voltage drive signal through a power amplification circuit into the drive signal, and outputting the drive signal to a mega soundwave transducer assembly body through an impedance matching circuit; and the mega soundwave transducer assembly body loads the generated drive signal to produce a random variation sound field. Through the random phase-shifting hybridfrequency type piezoelectric vibrator combination mega soundwave transducer device, a uniformity sound field which is required by surface wet etching cleaning can be generated.
Description
Technical field [0001] The invention relates to a megasonic transducer, in particular to a random phase-shift mixing type piezoelectric vibrator combined megasonic transducer device. Background technique [0002] As the feature size of integrated circuits enters the deep sub-micron stage, the control requirements for wet etching and cleaning in the manufacturing process of integrated circuit wafers are getting higher and higher, the accuracy of the etching is getting higher and higher, and the particles to be cleaned are increasing. Small, the uniformity of corrosion and cleaning becomes a challenging problem. [0003] Chemical corrosion and cleaning under the action of megasonic waves help to accelerate the effect of corrosion and cleaning, and greatly improve the removal of pollutant particles. However, due to the interference phenomenon of the megasonic sound field, many hot spots with high sound field intensity will be formed on the wafer, and many dead spots with very low sou...
Claims
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IPC IPC(8): B06B1/06
Inventor吴仪马嘉
OwnerBEIJING NAURA MICROELECTRONICS EQUIP CO LTD