Temperature compensation system and method for capacitance type micro-mechanical accelerometer
A technology of capacitive micro-mechanics and temperature compensation, which is applied in the direction of measuring acceleration, speed/acceleration/shock measurement, measuring devices, etc., can solve problems such as unreachable, temperature measurement error, high compensation accuracy, etc., to avoid temperature measurement error, Effect of reducing temperature compensation cost and improving temperature compensation accuracy
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[0020] The capacitive micro-mechanical acceleration sensor is sensitive to the external acceleration signal, and converts the acceleration signal into a capacitance change, and converts the capacitance change inside the sensor into a voltage change through the capacitance / voltage conversion circuit, and then the input acceleration can be obtained through the subsequent processing circuit The size of the signal, so as to realize the detection of acceleration. Since the key unit of the capacitive micro-machined acceleration sensor is a capacitor, when the temperature changes, the capacitance of the capacitor will change, which will cause a change in the system's zero-bias output signal and affect the detection of the real acceleration signal by the capacitive micro-machined accelerometer system . In order to reduce the influence of temperature on the output signal of the capacitive micromachined accelerometer system, it is necessary to adopt an effective temperature compensation...
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