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Dual-capacitance type micro-machine accelerator sensor and temperature self-compensating system based on it

An acceleration sensor and dual-capacitor technology, applied in the direction of measuring acceleration, speed/acceleration/shock measurement, instruments, etc., can solve problems affecting acceleration signal detection, avoid temperature measurement errors, improve temperature compensation accuracy, and eliminate nonlinear effects Effect

Active Publication Date: 2017-05-31
XIAN UNIV OF POSTS & TELECOMM
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Problems solved by technology

[0003] Since the key unit of the capacitive micromachined acceleration sensor is the capacitor, when the temperature changes, the structural size of the capacitor, the dielectric constant in the environment, the thermally induced stress and the residual stress in the structure will all change, resulting in the capacitance of the capacitor A change occurs, that is, a change in the output signal of the accelerometer, which affects the detection of the real acceleration signal by the accelerometer

Method used

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  • Dual-capacitance type micro-machine accelerator sensor and temperature self-compensating system based on it
  • Dual-capacitance type micro-machine accelerator sensor and temperature self-compensating system based on it
  • Dual-capacitance type micro-machine accelerator sensor and temperature self-compensating system based on it

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Embodiment Construction

[0028] The present invention will be further described below in conjunction with the accompanying drawings.

[0029] The existing variable-area gate structure capacitive detection micro-machine acceleration sensor such as image 3 As shown, the improved variable-area gate structure dual-capacitance micromachined acceleration sensor is as follows: figure 2 shown. The improvement method is as follows:

[0030] (1) Design the width of the gate electrode in the X direction as two different size parameters, such as figure 2 W1 and W2 are shown, where W1<W2.

[0031] (2) Design the width of the fixed aluminum electrode in the X direction as two different size parameters, such as figure 2 W5 and W6 shown, where W5<W6.

[0032] (3) Design the overlapping width between the gate electrode and the fixed aluminum electrode in the X direction as two different size parameters, such as figure 2 W3 and W4 shown, where W3<W4.

[0033] (4) The lengths of the gate electrode and the fi...

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Abstract

The invention discloses a dual-capacitance type micro-machine accelerator sensor and a temperature self-compensating system based on the dual-capacitance type micro-machine accelerator sensor; the dual-capacitance type micro-machine accelerator sensor comprises two grids and two fixing aluminum electrodes which are respectively corresponding to two output ends; the two output ends are respectively connected with input ends of two differential capacitance voltage switching circuits, and output ends of the differential capacitance voltage switching circuits are respectively connected with an output end of a high-frequency carrier wave generator and an input end of a coherent demodulator; the output end of the coherent demodulator is connected with the input end of a low pass filter, and the output end of the low pass filter is connected with the input end of the temperature self-compensating system. The system can measure temperature of the acceleration sensor instead of an additional temperature sensor, expel the influence of the temperature measurement bias caused by temperature gradient on the compensation precision, improve the temperature compensation precision while eliminate the influence of the non-linear characteristics of the temperature coefficient on the temperature compensation result.

Description

technical field [0001] The invention belongs to the field of acceleration measurement, in particular to a dual-capacitance micro-machine acceleration sensor and a temperature self-compensation system based on the sensor, which optimizes and improves the temperature drift performance of the capacitive micro-machine acceleration sensor. Background technique [0002] The capacitive micro-mechanical acceleration sensor is sensitive to the external acceleration signal, and converts the acceleration signal into the change of the differential capacitance. The change of the differential capacitance is converted into a voltage signal through the differential capacitance voltage conversion circuit, and the input acceleration can be obtained through the subsequent processing circuit. The size of the signal, so as to realize the detection of acceleration. [0003] Since the key unit of the capacitive micromachined acceleration sensor is the capacitor, when the temperature changes, the s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/125G01D3/036
CPCG01D3/036G01P15/125G01P2015/0865Y02E40/30
Inventor 张霞刘维红李立珺
Owner XIAN UNIV OF POSTS & TELECOMM
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