Temperature compensating device for micro-machined capacitive accelerometer
A temperature compensation device, capacitive micro-machine technology, applied in the direction of measurement of acceleration, speed/acceleration/shock measurement, measurement device, etc., can solve the problems of unreachable, temperature measurement value error, high compensation accuracy, etc., to eliminate influence and simplify structure, the effect of improving the accuracy of temperature compensation
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[0016] The capacitive micromechanical acceleration sensor is sensitive to the external acceleration signal, and converts the acceleration signal into a change in differential capacitance. The differential capacitance inside the sensor is converted into a differential voltage signal through the first charge amplifier and the second charge amplifier, and processed by the subsequent stage. The circuit can get the size of the input acceleration signal, so as to realize the detection of the acceleration. Since the key unit of the capacitive micromachined acceleration sensor is a capacitor, and when the temperature changes, the capacitance of the capacitor will also change, which will cause a change in the zero output signal of the accelerometer and affect the detection of the real acceleration signal by the accelerometer. In order to reduce the influence of temperature on the output signal of the capacitive micromachined accelerometer, it is necessary to use an effective temperature...
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