Mask plate installing device of exposure machine
An installation device and mask technology, which can be used in photolithography process exposure devices, optomechanical equipment, microlithography exposure equipment, etc., and can solve problems such as the disappearance of the suction force of the negative pressure unit, the falling of the mask, and the deflation of the air bag. , to prevent damage
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[0034] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
[0035] figure 2 A schematic structural view of the mask plate mounting device of the exposure machine of this embodiment is shown, image 3 yes figure 2 The enlarged view of the local structure in Figure 4 is a schematic diagram of the anti-mask drop structure. refer to figure 2 and image 3 , the exposure machine mask installation device includes: a mask holder 8 for fixing the mask 9, a plurality of airbags arranged under the mask holder 8 for supporting the mask holder 8, and a gas communicated with the airbags A supply unit (not shown in the figure), the gas supply unit may be a CDA supply unit; a pneumatic switch valve is arranged on the gas supply pipeline ...
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