Optical interference gas detection system with air pressure balance device
A gas detection system and air pressure balance technology, which are used in measurement devices, phase influence characteristic measurement, material analysis by optical means, etc., can solve the problems of interference fringe change, difficult processing, difficult to achieve, etc., and meet the requirements of reducing high precision , High measurement accuracy, and the effect of improving the durability level
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[0015] A non-limiting embodiment is given below in conjunction with the accompanying drawings to further illustrate the present invention.
[0016] refer to figure 1 As shown, an optical interference gas detection system with an air pressure balance device includes a light source 4, a plane beamsplitter 6, an air chamber 8, a refractive right-angled prism 11, a reflective right-angled prism 5, an image sensor 1 and a light beam consisting of several optical elements. The interference optical path system is characterized in that it also includes a closed pressure balance device 7, wherein the pressure balance device 7 communicates with the air chamber 8;
[0017] On the optical path of the light source 4, the plane beam splitter 6 installed at 45° divides the light beam emitted by the light source 4 and passing through the light slit 3 into parallel beams a, b and c;
[0018] The incident end of the air chamber 8 corresponds to the 45° face of the plane beamsplitter 6, and its...
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