Differential pressure sensing method and sensor thereof

A differential pressure sensor and differential pressure sensing technology, applied in the field of sensors, can solve the problems of complex sensor structure, unreliable performance, high processing cost, etc., achieve the effect of simple optical fiber layout, simplified data processing module, and avoid freezing
CN103557985AInactive Publication Date: 2014-02-05贵阳高新兆诚科技有限公司
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
贵阳高新兆诚科技有限公司
Publication Date
2014-02-05
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a differential pressure sensing method and a sensor thereof. According to the differential pressure sensing method, pressure produced through detection fluid impacts one surface of an elastic membrane (113), meanwhile narrow-spectrum laser irradiates the other surface of the elastic membrane (113), the elastic membrane (113) can deform, the output light intensity of a receiving optical fiber (41) can change after the elastic membrane (113) deforms, and pressure variation caused by the fluid on the elastic membrane (113) is judged by detecting the variation of the output light intensity of the receiving optical fiber (42). By the adoption of the method, the sensor is high in sensing accuracy, reliable in performance, simple in structure, low in volume and mass and low in manufacturing cost.
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Description

technical field

[0001] The invention relates to a differential pressure sensing method and a sensor thereof, belonging to the technical field of sensors. Background technique

[0002] Differential Pressure Sensor DPS (Differential Pressure Sensor) is a sensor used to measure the difference between two pressures, usually used to measure the pressure difference between the front and back ends of a device or component. In recent years, differential pressure sensors have been widely used in many high-precision measurement occasions such as micro-flow measurement, leak testing, clean room monitoring, environmental tightness testing, gas flow measurement, and liquid level measurement.

[0003] At present, the research on differential pressure sensors at home and abroad mainly focuses on the traditional piezoresistive differential pressure sensors and capacitive differential pressure sensors. The piezoresistive differential pressure sensor has a simple structure and a flat working...

Claims

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