Rectangular quartz double-polarization blazed grating with 532 nanometer wave band

A blazed grating and dual-polarization technology, applied in the field of dual-polarized blazed gratings, can solve the problems of high processing precision, complicated grating processing technology, and limited applications

Inactive Publication Date: 2014-07-02
CHONGQING UNIV OF ARTS & SCI
View PDF5 Cites 5 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, no matter the zigzag or step-shaped blazed grating, it is required to maintain a certain inclination between the groove surface and the grating surface, which requires high processing precision of the grating, which makes the grating processing complicated and reduces the diffraction efficiency. its application

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Rectangular quartz double-polarization blazed grating with 532 nanometer wave band
  • Rectangular quartz double-polarization blazed grating with 532 nanometer wave band
  • Rectangular quartz double-polarization blazed grating with 532 nanometer wave band

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0018] A rectangular quartz dual-polarization blazed grating is fabricated by microfabrication. The production process includes: chrome-plating of quartz substrate → coating of photoresist → exposure → development → etching → removal of residual chromium film and other steps. Firstly, a layer of uniform chromium film is basically deposited on clean and dry fused silica, and a layer of positive photoresist is uniformly coated on the chromium film. The grating is then recorded using holographic exposure, as Figure 6 As shown, the He-Cd laser, with a wavelength of 441 nm, emits two beams of plane waves with 2 θ The included angle forms an interference field on the quartz substrate. After the exposure is completed, develop, and transfer the photoresist pattern from the photoresist to the chrome film with a chrome removal solution, and use chemical reagents to remove excess photoresist. Finally, the grating pattern is transferred to the quartz substrate by plasma etching, and t...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

Disclosed is a rectangular quartz double-polarization blazed grating with a 532 nanometer wave band. The rectangular quartz double-polarization blazed grating is characterized in that the grating employs a quartz medium and has a surface in a rectangular embossment structure, a period of 490-530 nm, a groove depth of 0.97-1.17 [mu]m and a grating duty ratio of 0.62. Under autocollimation angle arrangement, the double-polarization blazed grating can simultaneously diffract TE polarization incident light and TM polarization incident light to a -1 grade transmitted beam, and the -1 grade diffraction blazing efficiencies of the TE polarization incident light and the TM polarization incident light are both higher than 90%. The rectangular quartz double-polarization blazed grating is processed through photoetching, the structure is simple, and the manufacturing is convenient.

Description

technical field [0001] This patent relates to a dual-polarization blazed grating, especially a rectangular quartz dual-polarization diffraction blazed grating with a wavelength of 532 nanometers that can be used in high-intensity laser systems, grating spectrometers, precision measurement and other fields. Background technique [0002] Diffraction grating is the core dispersion device of grating spectrometer, and it is usually necessary to diffract the incident light to a certain order of the grating when used. However, in an ordinary diffraction grating, the zero-order diffracted light without dispersion characteristics occupies a large part of the energy, while the intensity of the diffracted light of other orders, especially the higher order, is weak. In order to overcome this problem, the grating formed by the specific shape of the groove can concentrate the diffracted light to a specific order spectrum, which is called a blazed grating. The grooves of traditional blaze...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & AuthorityApplications(China)
IPC IPC(8): G02B5/18
Inventor赵华君袁代蓉
OwnerCHONGQING UNIV OF ARTS & SCI