Encoder, production method for encoder scale, production method for encoder, and drive device

Abstract

An encoder, comprising: a scale section having a base material comprising a metal material, having a pattern formed on a first surface of the base material, and having a passivation section formed on a second surface of the base material differing from the first surface; and a detection unit that moves relative to the scale section, and detects the pattern.

Description

technical field [0001] The present invention relates to an encoder, a method for manufacturing a scale for the encoder, a method for manufacturing the encoder, and a driving device. [0002] this application claims priority based on Japanese Patent Application No. 2011-287350 for which it applied on December 28, 2011, The content is used here. Background technique [0003] An encoder is known as a device for detecting rotation information such as a rotation speed, a rotation angle, and a rotation position of a rotating body including a rotation shaft of a motor. As one of such encoders, for example, a reflective optical encoder is known (for example, refer to Patent Document 1). A reflective optical encoder has, for example, a disk member having a reflective area and a non-reflective area formed on its surface, and detects the rotation information by detecting light reflected in the reflective area by a light receiving element. [0004] When manufacturing a disc member, fo...

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Problems solved by technology

[0008] However, for example, in the case of forming a substrate using a material that dissolves in an etching solution such as untreated aluminum (such as pure aluminum), when the substrate is immersed in an etching solution, a part of the substrate is dissolved, and the dissolved aluminum remains between patterns, etc. , there are cases where it becomes an obstacle to the etching process

Therefore, there is a case where the accuracy of patterning is lowered, resulting in a lowered yield

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