Staggered folding optical path structure of small-sized grating monochromator with high spectral resolution
A high-spectrum, high-resolution technology, applied in the field of spectral analysis instruments, can solve the problems of increased instrument volume and weight, and achieve the effects of small volume, simple processing and assembly, and compact structure
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Embodiment 1
[0013] In the optical path structure of the present invention, such as figure 1 As shown, the working band of the monochromator is 400-800nm, and the object-side numerical aperture is 0.07; the collimating objective lens 3 and the converging objective lens 5 are both spherical mirrors, the radius of curvature is 600mm, and the off-axis angles are 7° and 5.5° respectively , the focal lengths are 300mm and 296.5mm respectively; the plane grating 4 adopts a reflective ruled grating whose grating constant is 1 / 1200mm; The radius is 5400mm, or when the cylindrical reflector is used as the second deflection mirror 6 to eliminate system astigmatism, the radius of curvature of the cylindrical reflector is 3200mm.
[0014] Through optical design software tracking, the theoretical resolution of the optical path structure of a staggered folded small high-resolution grating monochromator constructed in this example can reach 0.1nm, and the optical path length and width are 194mm×172mm.
Embodiment 2
[0016] In the optical path structure of the present invention, such as figure 2 As shown, the working band of the monochromator is 400-800nm, and the numerical aperture on the object side is 0.07; the collimating objective lens 3 and the converging objective lens 5 are both spherical mirrors, the radius of curvature is 600mm, and the off-axis angles are 6.5° and 8° respectively , the focal lengths are 300mm and 295.2mm respectively; the plane grating 4 adopts a reflective ruled grating whose grating constant is 1 / 1200mm; The radius is 3300mm, or when the cylindrical reflector is used as the second deflection mirror 6 to eliminate system astigmatism, the radius of curvature of the cylindrical reflector is 4400mm.
[0017] Through optical design software tracing, the theoretical resolution of the optical path structure of a staggered folded small high-resolution grating monochromator constructed in this example can reach 0.3nm, and the optical path length and width are 194mm×17...
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