Batching method for gas state materials

Abstract

The invention discloses a batching method for gas state materials. The batching method comprises the following seven steps: feeding WF6 gas to a separation unit, vacuumizing an HF material feeding device, adjusting the leak rate of HF gas, feeding the HF gas into the separation unit, vacuumizing an N2 material feeding device, adjusting the leak rate of the N2 gas, and feeding the N2 gas into the separation unit. According to the batching method disclosed by the invention, the materials can be quantitatively adjusted and supplied; the material flows fed to the separation unit and the content of the materials can be guaranteed to be invariable; the flows of the three materials in the testing process are highly different, and the flow of the WF6 can be controlled by a mass method, and the flows of the HF and the N2 are controlled by a volumetric method, so that the flow control precision can be improved, and the control difficulty can be reduced; as a valve W7 and a valve N4 are utilized, the batching method can meet the requirement on high leak rate of the material.

Description

technical field [0001] The invention belongs to a batching method, in particular to a batching method of gaseous materials. Background technique [0002] on WF 6 During the production process, there will be a certain amount of light impurities, such as HF, N 2 , O 2 etc., produced or leaked into the product, so the output WF 6 The material is purified. [0003] In the separation of the above WF 6 In the process of experimental research with light impurities, it is necessary to simulate the raw materials in the production device, and the results of the quantitative ratio will directly affect the objectivity and accuracy of the test results. But simply put WF 6 , HF, N 2 , O 2 When standing in a closed container, the above-mentioned gases will be distributed in layers instead of uniformly mixed, resulting in uneven composition and content of the materials flowing out of the container. Therefore, the above-mentioned batching method cannot meet the existing needs. Cont...

AI Technical Summary

Problems solved by technology

But simply put WF 6 , HF, N 2 , O 2 When standing in a closed container, the above-mentioned gases will be distributed in layers instead of uniformly mixed, resulting in uneven composition and content of the materials flowing out of the container. Therefore, the above-mentioned batching method cannot meet the existing needs

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