Dosing system for gaseous materials

Abstract

The invention discloses a batching system for gaseous materials, which comprises a WF6 feeding device, an HF feeding device, and a N2 feeding device connected to a batching tank. WF6 pressure stabilizing tank, WF6 mass flowmeter, batching tank, the HF feeding device includes HF feeding container, HF stabilizing tank, HF mass flowmeter, standard volume tank and batching tank connected in sequence through pipelines and valves , N2 feeding device includes N2 feeding container, N2 surge tank, N2 mass flow meter, standard volume tank, batching tank connected in sequence through pipelines and valves. The invention realizes the quantitative adjustment and supply of each material and ensures The material flow of batching tank and respective content are stable, respectively adopt mass method to control the flow of WF6 and volumetric method to control the flow of HF, N2, control precision and control difficulty, the use of valve W7 and valve N4, make the present invention It can meet the requirements of large material leakage rate.

Description

technical field [0001] The invention belongs to a batching device, in particular to a batching system for gaseous materials. Background technique [0002] on WF 6 During the production process, there will be a certain amount of light impurities, such as HF, N 2 , O 2 etc., produced or leaked into the product, so the output WF 6 The material is purified. [0003] In the separation of the above WF 6 In the process of experimental research with light impurities, it is necessary to simulate the raw materials in the production device, and the results of the quantitative ratio will directly affect the objectivity and accuracy of the test results. But simply put WF 6 , HF, N 2 , O 2 When standing in a closed container, the above-mentioned gases will be distributed in layers instead of uniformly mixed, resulting in uneven composition and content of the materials flowing out of the container. Therefore, the above-mentioned batching method cannot meet the existing needs. Con...

AI Technical Summary

Problems solved by technology

But simply put WF 6 , HF, N 2 , O 2 When standing in a closed container, the above-mentioned gases will be distributed in layers instead of uniformly mixed, resulting in uneven composition and content of the materials flowing out of the container. Therefore, the above-mentioned batching method cannot meet the existing needs

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