A conductor surface potential measuring instrument based on electrostatic control torsion

Abstract

The invention provides a conductor surface potential measuring instrument based on static controlled twist pendulum, which comprises the components of a suspension wire, a probe bracket, a scanning probe, a multi-freedom micro-displacement translation platform, an angle sensor, a control system and a feedback executor. The scanning probe is arranged on a random end surface of the probe bracket. The suspension wire and the probe bracket form a twist pendulum. In operation, a to-be-measured sample is arranged on the multi-freedom micro-displacement translation platform. The to-be-measured surface of the to-be-measured sample right opposes and is parallel with the end surface of the scanning probe. The end surface of the scanning probe does not contact with the to-be-measured surface. When an interaction exists between the scanning probe and the to-be-measured sample, the angle sensor transmits the detected torsion information of the twist pendulum to the control system; after a PID calculation is performed, an acquired feedback control voltage is transmitted to the feedback executor; a feedback control torque which is equivalent with an outer torque is generated and applied to the probe bracket, so that the probe bracket is kept stationary relatively; The micro-displacement translation platform is driven for making the to-be-measured sample move relative to the scanning probe, thereby realizing scanning and measurement for different areas on the sample surface.

Description

technical field [0001] The invention belongs to the field of precision measurement, and more specifically relates to a conductor surface potential measuring instrument based on electrostatically controlled torsion. Background technique [0002] With the development and progress of science, the requirements for experimental accuracy in various weak force measurement experiments on the ground and in space are getting higher and higher, so higher requirements are put forward for the morphology of the inspection quality surface and the potential distribution on the surface. requirements. In order to process the inspection quality that meets the experimental requirements, firstly, extremely high-precision instruments are needed to measure the potential distribution, electromagnetic parameters and surface topography of the inspection quality surface. Then, according to the measurement results of various features of the quality inspection surface, the corresponding feature differe...

AI Technical Summary

Problems solved by technology

[0008] Aiming at the defects of the prior art, the object of the present invention is to provide a conductor surface potential measuring instrument based on electrostatic control torsion, aiming at solving the problem of low resolution of conductor surface potential measurement

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